Analyzer for detecting pollution of ion source

The invention relates to an analyzer for detecting pollution of an ion source, which comprises an ion screen pipe, and further comprises a controller, wherein a plurality of graphite strips which are isolated mutually and side-by-side are arranged on the side wall of the ion screen pipe; the controller is connected with the various graphite strips; monotypic impurity ions are received by the graphite strips; and the controller monitors the impurity ions on the graphite strips to be used for detecting the pollution of the ion source. According to the analyzer for detecting the pollution of the ion source, the graphite strips which are isolated mutually and side-by-side are arranged on the side wall of the ion screen pipe; as the ion moving radiuses of the impurity ions are different, the impurity ions fall down at the different positions on the side wall of the ion screen pipe of the analyzer, namely, different graphite strips can receive different impurity ions; and the controller is connected with the rear ends of the various graphite strips to detect electrical current of each graphite strip and detect whether the impurity ions are abnormal or not, so that whether the ion source causes pollution or whether the ion source is unstable is judged and massive product pollution is avoided.