Horizontal type movable cathode coating machine

The invention discloses a horizontal type movable cathode coating machine. The horizontal type movable cathode coating machine comprises a mounting frame, a vacuum cavity, a reciprocating motion mechanism, a linear cathode source, a weak current access port, a filtering and inflating device, a flap valve, a coarse pumping mechanical pump, a front-stage mechanical pump, a molecular pump, a gate valve, a tray feeding table, a feeding motor and a tray; and the vacuum cavity is formed in one side of the interior of the mounting frame. According to the horizontal type movable cathode coating machine, the pilot scale production process of metal terbium, dysprosium and aluminum coated film on the surface of flaky and columnar neodymium iron boron ceramic is realized, and the coating machine can also be used for surface modification coating of various materials; through the pilot scale production of the neodymium iron boron ceramic sheet and the ceramic column magnetron sputtering metallized film, the capacity in each day can also reach 10-50 kilograms; the machine is especially suitable for surface coating of the metallization function film of the neodymium iron boron magnetic ceramic sheet and the ceramic column, for example, the surface modification coating of the sputtering terbium, dysprosium and aluminum; and a full-automatic design is adopted for the production line, the production efficiency is high, the cleanliness is high, and the reliability is good.