MEMS switch

a micro-electromagnetic system and switch technology, applied in relays, generators/motors, waveguide devices, etc., can solve the problems of increasing and achieve the effect of improving the contact structure of signal lines, reducing contact resistance and insertion loss

Inactive Publication Date: 2007-07-12
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0011]Exemplary embodiments of the present invention address the above problems and / or disadvantages and provide at least the advantages described below. Accordingly, an aspect of the present invention is to provide a MEMS switch, which has an improved contact structure for signal lines, thereby reducing the contact resistance and the insertion loss according thereto.

Problems solved by technology

Such a structure not only increases the contact resistance, but also the insertion loss according thereto.

Method used

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Examples

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Embodiment Construction

[0041]Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout. The embodiments are described below in order to explain the present invention by referring to the figures.

[0042]FIG. 3 is a perspective view exemplifying a structure of a MEMS switch in accordance with an exemplary embodiment of the present invention, and FIG. 4 is a cross-sectional view taken along line IV-IV′ of FIG. 3.

[0043]Referring to FIGS. 3 and 4, the MEMS switch 100 in accordance with the exemplary embodiment of the present invention includes a substrate 101, a fixed signal line 110, a movable signal line 130, and a piezoelectric actuator 150.

[0044]The fixed signal line 110 is formed at one side on the middle of the substrate 101, and the movable signal line 130 is formed at the other side on the middle of the substrate 101. The movable signal line 130 at ...

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PUM

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Abstract

A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Description

[0001]This application claims priority under 35 U.S.C. § 119 (a) from Korean Patent Application No. 10-2006-02643 filed on Jan. 10, 2006 in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]An apparatus consistent with the present invention relates to a MEMS (Micro Electro Mechanical System) switch, such as an RF (Radio Frequency) switch, fabricated using a MEMS technique and, in particular, to a MEMS switch which is driven by using a piezoelectric element or actuator.[0004]2. Description of the Related Art[0005]Among RF elements using the MEMS technique, an RF switch is most widely fabricated. The RF switch is an element, which is used often in an impedance matching circuit or for selectively transmitting a signal, in wireless communication terminals and systems of microwave or millimeter wave band.[0006]FIG. 1 is a top plan view exemplifying a structure of a conventio...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B41J2/04B81B3/00H01H57/00H01L41/09H01L41/187
CPCB41J2/04581B41J2/04541B81B3/00B81B7/02
Inventor HONG, YOUNG-TACKKIM, DONG-KYUNSONG, IN-SANGLEE, SANG-HUNKWON, SANG-WOOKKIM, JONG-SEOKKIM, CHE-HEUNG
Owner SAMSUNG ELECTRONICS CO LTD
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