Tunable micro-bolometer image element structure and image element array
A technology of microbolometer and pixel structure, applied in optical radiation measurement, electric radiation detector, radiation pyrometry, etc., can solve the problem of high electrostatic driving voltage and limitation of Fabry-Perot resonant cavity parallelism and other issues, to achieve the effect of improving parallelism, narrowing absorption bandwidth, and reducing electrostatic driving voltage
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[0021] The principles and features of the present invention will be described below with reference to the accompanying drawings. The examples cited are only used to explain the present invention, and are not used to limit the scope of the present invention.
[0022] Such as figure 1 with figure 2 As shown, a tunable microbolometer pixel structure includes a substrate 11, a bottom electrode 12, a reflective layer 13, and an absorption layer 14. The bottom electrode 12 is fixed on the upper end surface of the substrate 11 , A column is provided on the substrate 11, a first supporting device 17 is fixedly provided on the column, and the absorption layer 14 is fixedly connected to the first supporting device 17 and is located above the bottom electrode 12 The upper end of the absorption layer 14 is fixedly provided with a heat-sensitive material 15; the reflection layer 13 is placed between the bottom electrode 12 and the absorption layer 14, and the reflection layer 13 is connected to
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