Super junction device
A superjunction device and charge technology, applied in the field of semiconductor integrated circuits, can solve the problems of reducing EAS capability, EAS burning, reducing parasitic triode base current, etc., to avoid high electric field damage, simple electric field distribution, and saving chip size.
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[0048] The technical solution of the embodiment of the present invention is obtained on the basis of analyzing the existing technical problems. Before describing the technical solution of the embodiment of the present invention in detail, the structure of the existing super junction device will be described as follows: figure 1 Shown is a schematic diagram of the layout structure of an existing super junction device; figure 2 Yes figure 1 Schematic diagram of the cross-sectional structure of the device at the position of line AA; image 3 Yes figure 2 A schematic diagram of the device cross-sectional structure when the middle gate structure is a planar gate; the middle area of the existing super junction device is the charge flow area, the terminal protection area is formed on the peripheral side of the charge flow area, and the transition area is located between the terminal protection area and the terminal protection area. Between the charge flow areas, figure 2 The left side
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