Super junction device

A superjunction device and charge technology, applied in the field of semiconductor integrated circuits, can solve the problems of reducing EAS capability, EAS burning, reducing parasitic triode base current, etc., to avoid high electric field damage, simple electric field distribution, and saving chip size.

Pending Publication Date: 2020-11-03
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Since the parasitic triode will be turned on when the base current of the parasitic triode is large, thereby reducing the EAS capability, so in order to improve the EAS capability of the device, it is usually necessary to guide the avalanche current path away from the base region

Method used

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Example Embodiment

[0048] The technical solution of the embodiment of the present invention is obtained on the basis of analyzing the existing technical problems. Before describing the technical solution of the embodiment of the present invention in detail, the structure of the existing super junction device will be described as follows: figure 1 Shown is a schematic diagram of the layout structure of an existing super junction device; figure 2 Yes figure 1 Schematic diagram of the cross-sectional structure of the device at the position of line AA; image 3 Yes figure 2 A schematic diagram of the device cross-sectional structure when the middle gate structure is a planar gate; the middle area of ​​the existing super junction device is the charge flow area, the terminal protection area is formed on the peripheral side of the charge flow area, and the transition area is located between the terminal protection area and the terminal protection area. Between the charge flow areas, figure 2 The left side

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PUM

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Abstract

The invention discloses a super junction device, a P-type ring is formed in a transition region, and a layout structure comprises a gate bus composed of a front metal layer, a gate liner and a sourcemetal layer; the gate bus and the gate liner are surrounded by the source metal layer; the gate bus is completely located above the region of the charge flow region; the P-type ring surrounds the gatebus and the gate liner; the source electrode metal layer covers the grid electrode bus and the charge flowing region outside the grid electrode liner and extends to the upper part of the P-type ring;each gate conductive material layer is connected to the corresponding gate bus or gate liner through a first contact hole, a plurality of second contact holes connected to the source metal layer areformed in the P-type ring, and a non-intersection structure between the gate conductive material layer and the P-type ring enables the second contact holes to be formed in each area of the top of theP-type ring. According to the invention, the EAS capability and the UIS capability of the device can be improved, the gate structure can be prevented from being damaged by a high electric field, and the chip size can be effectively saved.

Description

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Claims

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Application Information

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Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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