High-temperature chemical vapor deposition system and equipment

A technology of vapor phase deposition and high-temperature chemistry, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of rapid heat dissipation of the heating barrel, poor insulation of the heating system, and inability to heat, etc., so as to achieve convenient reaction time and reaction temperature, easy to carry out efficiently, and the effect of increasing applicability

Pending Publication Date: 2021-04-30
张家港迪源电子科技有限公司
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Problems solved by technology

[0004] The present invention provides a high-temperature chemical vapor deposition system and equipment, aiming to solve the problem that the existing high-temperature chemical vapor deposition heating system in the background technology cannot rapidly heat the deposition reaction barrel, the heating system has poor insulation and large heat radiation, and cannot be used after use. The problem of rapid cooling of the heating barrel

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  • High-temperature chemical vapor deposition system and equipment
  • High-temperature chemical vapor deposition system and equipment
  • High-temperature chemical vapor deposition system and equipment

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[0021]In order to make the objectives, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely intended to illustrate the invention and are not intended to limit the invention.

[0022]SeeFigure 1-4The present invention provides a technical solution: a high temperature chemical vapor deposition system includes an insulating heating tub 1 and a bottom case 2 fixed to a bottom portion thereof, an insulating heating tub 1 inner wall is provided with a heat generating member 3, and heat generating member 3 can generate 2000 Heating temperature above ° C;

[0023]The bottom case 2 is rotated and provided having a telescopic device 4 through the bottom of the insulating heating tub 1, and the bottom case 2 is also provided with a rotating device 5 that is rotatable with the rotation of the te

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Abstract

The invention belongs to the technical field of production of semiconductor equipment, and provides a high-temperature chemical vapor deposition system and high-temperature chemical vapor deposition equipment. The high-temperature chemical vapor deposition system comprises an insulated heating barrel and a bottom box which is fixedly arranged at the bottom of the insulated heating barrel, wherein heating parts are arranged on the inner wall of the insulated heating barrel, and the heating parts can generate a heating temperature above 2000 DEG C; and a telescopic device which penetrates through the bottom of the insulated heating barrel is rotatably arranged in the bottom box, a rotating device for driving the telescopic device to rotate and a ventilation assembly which communicates with the insulated heating barrel are arranged in the bottom box, and the ventilation assembly can generate air flows, and can introduce the air flows into the insulated heating barrel. According to the high-temperature chemical vapor deposition system and high-temperature chemical vapor deposition equipment, through the heating parts, the interior of the insulated heating barrel is quickly heated, thus an internal reaction can be conveniently carried out more efficiently, the insulativity of the system is enhanced, damage caused by heat radiation to the outside world is prevented, and the insulated heating barrel can be quickly cooled after the reaction is completed, so that the chemical vapor deposition heating system is more complete.

Description

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Claims

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Application Information

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Owner 张家港迪源电子科技有限公司
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