Flexible MEMS flow velocity sensor based on amorphous germanium thermal resistor

The invention discloses a flexible MEMS flow velocity sensor based on an amorphous germanium thermal resistor. The flexible MEMS flow velocity sensor comprises a flexible substrate, a support film, an insulation protection layer, a suspended film heating thermal resistor and suspended film temperature measurement thermal resistor pairpositioned between the support film and the insulation protection layer on a heat insulation cavity, a substrate temperature measurement thermal resistor pair for measuring the temperature change of environmental fluid and between the support film and the insulation protection layer on the flexible substrate outside the heat insulation cavity; the support film is partially suspended on the flexible substrate, the support film is connected with the insulating protective layer, and the suspended film heating thermal resistor, the suspended film temperature measurement thermal resistor pair and the substrate temperature measurement thermal resistor pair are respectively connected with the outside through corresponding leads and pins. Amorphous germanium semiconductor thermal resistance materials are adopted, the structure is simple, wide-range flow velocity measurement (10<-2>-10<2> m/s) and direction finding can be achieved, only a low constant temperature difference needs to be kept between the working temperature of the thermal resistor and the temperature of fluid in the working process, and therefore power consumption is low.