Mask storage system, query system, storage method and computer equipment

A storage system and mask technology, applied in the field of computer-readable storage media and mask storage systems, can solve problems such as drop, no storage box, and semiconductor device production interruption, and achieve the effect of avoiding interruption.

Pending Publication Date: 2022-02-18
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the reticle (reticle) used in the production of semiconductor devices does not have a dedicated storage box, and currently mainly relies on the reticle tree to store some temporarily unused reticle
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Method used

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Examples

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Example Embodiment

[0054] In order to facilitate understanding of the present application, the present application will be further described below with reference to the related drawings. The embodiment of the present application is given in the drawings. However, the present application can be implemented in many different forms, is not limited to the embodiments described herein. Conversely, the purpose of providing these embodiments is to make the disclosure of the present application more thoroughly.

[0055] All technical and scientific terms used herein are commonly understood by those skilled in the art, unless otherwise defined. The terms used herein in the specification of the present application are merely intended to describe the embodiments of the specific embodiments, and is not intended to limit the present application.

[0056] It will be appreciated that the terms "first", "second", and the like as used herein can be used herein to describe various elements, but these components are not

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PUM

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Abstract

The invention relates to a mask storage system, query system and storage method, computer equipment and a storage medium. The storage system comprises: a bearing device, where the bearing device comprises a mask placing area used for placing masks; the storage device that is used for storing preset coordinates and position information of each bearing device in the preset coordinates; the detection devices that are arranged in one-to-one correspondence with the bearing devices, and are used for detecting the bearing devices and sending a first detection signal when the mask is placed in the mask placement area, and when a mask plate is placed outside a mask plate placing area on the bearing device, sending a second detection signal; the detection device is connected with the storage device, and the storage device is further used for storing mask position information of the mask in a preset coordinate when receiving the first detection signal or the second detection signal; and the systema also includes the alarm devices that are connected with the detection devices in a one-to-one correspondence manner and are used for performing alarm display when receiving the second detection signal, so that the risk that the mask plate falls off and is damaged is avoided.

Description

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Claims

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Application Information

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Owner CHANGXIN MEMORY TECH INC
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