Vibration wave driving apparatus, vibration member and driving system for the vibration wave driving apparatus
a technology of vibration member and driving apparatus, which is applied in the direction of piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive/magnetostriction machines, etc., can solve the problem of lowering the output of ultrasonic motors and the inability to ensure the electrode region of a sensor phase for detecting the vibration of the vibration
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[0048]Now, a description will be given in more detail of preferred embodiments of the present invention with reference to the accompanying drawings.
[0049]FIG. 1 is a cross-sectional view showing an ultrasonic motor which is an example of a vibration wave driving apparatus. Reference numeral 11 denotes an elastic member which is made of metal or the like and structures a vibration member, and a piezoelectric element 12 is fixed to a bottom surface of the elastic member 11 as an electro-mechanical energy conversion element shown in FIG. 11. A frictional material 15 made of resin is stuck onto an opposite surface of the elastic member 11 to the piezoelectric element 12 and the elastic member 11 is fixed to a motor housing 20 by screws 22.
[0050]Reference numeral 16 denotes a rotor as a moving member which is in contact with the frictional material 15 of vibration member and made of metal whose surface is subjected to a hardening process. The rotor 16 is urged against the elastic member ...
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