Solid-state circuit assembly

A circuit device and semiconductor technology, which is applied in the manufacturing of semiconductor devices, circuits, and semiconductor/solid-state devices, etc., can solve problems such as the adverse effects of existing layout corrections and the decrease of integrated concentration.

Inactive Publication Date: 2009-04-29
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0013] However, the disadvantage in this case is that the higher bulk concentration actually seen in this approach is at least partially rejected again
[0014] This sequence has det

Method used

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  • Solid-state circuit assembly
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Embodiment Construction

[0028] in accordance with Figure 3A and Figure 3B The semiconductor substrate 1 having at least one first doped region of the first conductivity type p also includes a second doped region 2 of the second conductivity type n opposite to the first conductivity type p. Furthermore, the highly doped connection doped region 3 of the second conductivity type n is sequentially placed in the second doped region 2 to connect this region, creating an ohmic junction with the second doped region 2 . The conductive structure to be planarized is at least partially embedded and one or more insulating layers 6 are formed on the surface of the semiconductor substrate 1 in contact with the connecting doped region 3 . The conductive structure in this example is a contact hole or aperture 4 that is filled with a conductive substance, and an interconnection layer 5 that is electronically connected thereto.

[0029] In order to implement the interconnection layer 5 , it is preferred to implement th

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Abstract

The invention relates to a semiconductor circuit device, comprising a semiconductor substrate (1), a first doped region, a second doped region (2), a connecting doped region (3), and an insulating layer (6) , a conductive structure (4, 5) to be planarized, the charge carriers formed during the planarization step are doped by discharges formed in the first and second doped regions (1, 2) The heterogeneous regions (7) are reliably dissipated and dendrite formation is avoided.

Description

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Claims

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Application Information

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Owner INFINEON TECH AG
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