Method for adjusting inclination angle of light beams and illumination device for adjusting inclination angle of light beams

[0045] Example 1

[0046] A method for adjusting the tilt angle of a light beam, comprising the following steps:

[0047] Step 1: Use a collimating lens to collimate the beam, and the beam after collimation has a smaller divergence angle of the light in the beam;

[0048] Step 2: Use an angle adjuster to adjust the inclination angle of the collimated beam by means of reflection adjustment or refraction adjustment.

[0049] Embodiment 2

[0050] See Figure 12 , an illuminating device for adjusting the inclination angle of a light beam, comprising four groups of illuminating mechanisms, the illuminating mechanism includes a light source 1, a collimating lens 2 and an angle adjuster arranged along the light propagation direction, the light source 1 emits a light beam through the collimating The straight lens 2 is adjusted to be a parallel light beam, and then the light beam is adjusted by the angle adjuster to realize the angle deflection of the light beam, and incident on the surface of the flat plate 5 to be measured, so as to achieve a large-angle oblique incident illumination effect.

[0051] The angle adjuster includes a wedge-shaped prism 3 and a rotation adjustment mechanism 4 for controlling the wedge-shaped prism 3 to rotate along its axis. The wedge-shaped prism 3 is located at the back focal plane of the collimating lens 2. 4. Control the wedge prism 3 to rotate along its axis to r

[0067] Embodiment 3

[0068] See Figure 19 The difference between the third embodiment and the second embodiment is that the angle adjuster is a micro-mirror array 6, and after the light beam emitted by the light source 1 passes through the collimating lens 2, the light beam becomes parallel light, and the divergence angle of the light in the light beam is very large. The angle of the light beam is deflected through the micro-mirror array 6 and incident on the surface of the flat panel 5 to be tested, so as to achieve a large-angle oblique incident illumination effect, and the angular deviation range of the light in the light beam is less than 1 degree. By adjusting the micro-mirror array 6 , the angle adjustment of the incident light beam on the surface of the flat plate 5 to be measured is realized.