Method for preventing metal fuse from being excessively etched

A metal fuse, over-etching technology, used in electrical components, electrical solid devices, circuits, etc., can solve the problems of unguaranteed silicon dioxide thickness and slow speed.

Active Publication Date: 2019-06-14
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above-mentioned shortcoming of prior art, the object of the present invention is to provide a kind of method that avoids metal fuse from being over-etched, for solving the problem in the prior art due

Method used

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  • Method for preventing metal fuse from being excessively etched
  • Method for preventing metal fuse from being excessively etched
  • Method for preventing metal fuse from being excessively etched

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Embodiment Construction

[0023] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0024] see Figure 1a to Figure 6 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbit

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Abstract

The invention provides a method for preventing a metal fuse from being excessively etched. The method comprises the steps of providing a metal fuse, and depositing an interlayer film on the metal fuse; forming a top metal layer on the interlayer film, wherein titanium nitride layers are respectively arranged on an upper surface and a lower surface of the top metal layer; etching the top metal layer, and forming a bonding pad and a protection pattern arranged above the metal fuse; defining an etching window above the bonding pad and the protection pattern after a passivation layer is deposited;and etching according to the etching window to remove titanium nitride on an upper surface of the bonding pad, leftwards and rightwards opening the windows in the metal fuse to release a product generated by burnout of the metal fuse when a lower-layer fuse is protected by using the protection pattern as a mask. By the method, the metal fuse is protected, the windows are also formed in the metalfuse, the cost is reduced, meanwhile, the metal layer at a lower layer is protected, windows are formed in a left edge and a right edge of the metal fuse, and the product generated by burnout of the metal fuse is conveniently released and is prevented from being gathered in an original place to for short circuit.

Description

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Claims

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Application Information

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Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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