Convex double-layer pressure sensitive film based on MEMS process and FP cavity optical fiber acoustic sensor

A sensitive film and sensor technology, which is applied in the field of acoustic sensors, can solve the problems of large deformation of the sensitive film, flat spectral curve, and small hard deformation of the material, and achieve the effects of high reflectivity, reduced round-trip loss, and good deformation ability

Pending Publication Date: 2020-05-12
CHINA UNIV OF GEOSCIENCES (WUHAN)
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technology provides improved performance over existing technologies such as lithium niobate or silicon nitride bubble resonators due to its ability to effectively decrease losses caused during operation without affecting their overall functioning negatively. Additionally, it improves the quality of signals collected from certain types of devices like voice communication systems. Overall, these improvements enhance the functionality and reliability of microsensitive electronic components called FBARs.

Problems solved by technology

This patented technical solution describes an improved way for making fibers that can be used in electronic systems like sound detectors. These techniques involve creation of tiny holes within certain parts called fused silica (FS) cores through chemical reactions between specific substances inside them. By combining these minute components together into one unit they make up what's known as a microstructure device called FB cavieteria tape. However, this technique faces challenges due to factors including poor durability caused by thin layers of fragile metals, difficulty in achieving desired properties at lower frequencies than previous designs, and lack of flexibility when integrating it onto other types of electronics.

Method used

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  • Convex double-layer pressure sensitive film based on MEMS process and FP cavity optical fiber acoustic sensor
  • Convex double-layer pressure sensitive film based on MEMS process and FP cavity optical fiber acoustic sensor
  • Convex double-layer pressure sensitive film based on MEMS process and FP cavity optical fiber acoustic sensor

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Embodiment Construction

[0030] In order to make the purpose, technical solution and advantages of the present invention clearer, the embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0031] Please refer to figure 1 , the embodiment of the present invention provides a kind of outward convex double-layer pressure-sensitive film 1 based on MEMS technology, comprises soft film 11 and the medium hard film 12 that is plated under soft film 11, and the diameter of soft film 11 is larger than medium hard film The diameter of 12 makes the soft film 11 and the medium hard film 12 form a convex structure. The soft film 11 is a rubber film or silicone film made of PDMS, and its surface is smooth and clean. The thickness of the soft film 11 is 0.5-10 μm.

[0032] The thickness of dielectric hard film 12 is 500-2000nm, and it comprises several first dielectric layers 121 and several second dielectric layers 122, and the refractive index of first diel

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Abstract

The invention provides a convex double-layer pressure sensitive film based on an MEMS process. The film comprises a soft film and a medium hard film plated below the soft film, the diameter of the soft film is greater than that of the medium hard film; the soft film is a rubber film or a silica gel film made of PDMS, the medium hard film comprises a plurality of first medium layers and a pluralityof second medium layers, the refractive index of the first medium layers is larger than that of the second medium layers, and the first medium layers and the second medium layers are sequentially andalternately stacked from bottom to top. The invention further provides an FP cavity optical fiber acoustic sensor, when the FP cavity optical fiber acoustic sensor is used for collecting transmissionlight for demodulation, due to the fact that the reflectivity of the two cavity faces of the FP cavity is close to 99% through a thin film process, the transmission spectrum is a sharp comb-shaped spectral line, at the moment, the transmission light is received, and an acoustic pressure signal is obtained by demodulating an optical signal. The sensitive film manufactured by the method is large inperipheral deformation quantity, almost has no deformation in the diameter range of an optical fiber mode field, and is high in reflectivity.

Description

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Claims

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Application Information

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Owner CHINA UNIV OF GEOSCIENCES (WUHAN)
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