Metal oxide micro-nano structure based on laser direct writing as well as preparation and application thereof

A micro-nano structure and oxide technology, applied in the field of laser applications, can solve the problems of inapplicability to flexible substrates, poor controllability, and low precision, and achieve the effects of simple and efficient integration, high peak power, and wide application range

Pending Publication Date: 2020-12-04
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technique allows for precise fabrications of minute metallic particles called metal oxides, such as iron oxide. These tiny metal oxys have unique properties like being able to form stable solid solutions when exposed to water vapor during annealed processes. They also allow for easy manipulation through focused ion beam techniques, making it possible to create patterns of fine metal oxynanocrystals onto various materials surfaces. Additionally, this process provides flexibility and versatility in producing integrated circuits containing these metal oxons.

Problems solved by technology

Technologies described previously involve various techniques that require complex steps like multiple chemical treatments (chemistry) and/or specialized equipment. These technical problem addressed by these inventions relates to improving their efficiency, versatility, flexiblity, and applicational potential while also addressing issues related to current technological approaches including complexity, limitations associated with each technique due to factors like environmentally friendly nature requirements and long duration of operation.

Method used

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  • Metal oxide micro-nano structure based on laser direct writing as well as preparation and application thereof
  • Metal oxide micro-nano structure based on laser direct writing as well as preparation and application thereof
  • Metal oxide micro-nano structure based on laser direct writing as well as preparation and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0063] Using tin dioxide sol as a precursor, using a femtosecond laser to directly write tin dioxide micro-wire structures, the steps are as follows:

[0064] 1. Dissolve 8.37g of stannous chloride dihydrate powder in 75mL of absolute ethanol, heat to about 78°C and reflux for 3 hours;

[0065] 2. Heat and stir the above solution in the air to evaporate to 50mL to control the SnCl 2 The concentration is 0.74mol / L, and then placed in a constant temperature water bath at 30°C for 24 hours, at this time the solution turns light yellow, and the sol-gel preparation is complete;

[0066] 3. Clean the glass slides ultrasonically with ethanol and deionized water, then set the parameters of the homogenizer to 1000r / min, 5s and 2000r / min, 30s, and use the homogenizer to spin-coat the stannous chloride sol on the glass slides , to obtain a sol-gel film with a thickness of 4 microns;

[0067] 4. Place the sample on the optical table, find the sample under the low magnification object

Embodiment 2

[0073] Femtosecond laser direct writing experiments were carried out using tin dioxide sol as a precursor, and the morphology was improved by adding polyethylene glycol (Mn 400). The steps are as follows:

[0074] 1. Dissolve 8.37g of stannous chloride dihydrate powder in 75mL of absolute ethanol, heat to about 78°C and reflux for 3 hours;

[0075] 2. Heat and stir the above solution in the air to evaporate to 50mL to control the SnCl 2The concentration is 0.74mol / L, and then placed in a constant temperature water bath at 30°C for 24 hours of static aging. At this time, the solution turns light yellow, and then 0.5g polyethylene glycol (Mn400) is added, stirred for 5 hours, and the sol-gel Preparation completed;

[0076] 3. Clean the glass slides ultrasonically with ethanol and deionized water, then set the parameters of the homogenizer to 1000r / min, 5s and 2000r / min, 30s, and use the homogenizer to spin-coat the stannous chloride sol on the glass slides , to obtain a sol

Embodiment 3

[0081] Using tin dioxide sol as a precursor, draw graphics through CAD, use femtosecond laser to directly write tin dioxide micro-nano structures, and control the shape and arrangement of micro-nano structures. The steps are as follows:

[0082] 1. Use CAD to design spiral lines and letter structure patterns;

[0083] 2. Dissolve 8.37g of stannous chloride dihydrate powder in 75mL of absolute ethanol, heat to about 78°C and then reflux and stir for 3 hours;

[0084] 3. Heat and stir the above solution in the air to evaporate to 50mL, control the SnCl 2 The concentration is 0.74mol / L, and then placed in a constant temperature water bath at 30°C for 24 hours of static aging. At this time, the solution turns light yellow, then add 0.5g polyethylene glycol (Mn400), stir for 5 hours, and the sol is prepared ;

[0085] 4. Use ethanol and deionized water to ultrasonically clean the glass slides, and then use a homogenizer to spin-coat the sol onto the glass slides at a speed of 2000

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Abstract

The invention belongs to the technical field of laser application, and particularly relates to a metal oxide micro-nano structure based on femtosecond laser direct writing as well as preparation and application of the metal oxide micro-nano structure. The preparation method comprises the following steps of: firstly, mixing a metal oxide precursor with a solvent to prepare metal oxide precursor sol-gel, then coating the surface of a substrate with the sol-gel obtain a gel film, and carrying out femtosecond laser direct writing; and enabling the metal oxide precursor to react to generate a metaloxide micro-nano structure by utilizing energy generated by high peak power of femtosecond laser. According to the method, the preparation of the metal oxide micro-nano structure is directly realizedthrough a femtosecond laser direct writing technology, and the metal oxide can be directly sintered without other treatment due to high femtosecond laser peak power, so that the method is convenientand quick. The method is suitable for any hydrophilic or hydrophobic substrate, and can realize the preparation of any metal oxide micro-nano structure with high precision, cross scale and high orientation.

Description

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Claims

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Application Information

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Owner HUAZHONG UNIV OF SCI & TECH
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