Manufacturing methods and manufacturing apparatuses of display panel and thin film transistor

A technology of thin film transistors and manufacturing methods, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc., can solve the problems of reducing device switching ratio and high leakage current of active layer, and achieve increasing switching ratio and electron mobility Small, the effect of suppressing leakage current

Active Publication Date: 2021-03-23
BEIHAI HKC OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This technology allows for improved switching efficiency between devices without adding extra layers or components that may affect their electrical properties. By placing an opaque material over this special layer prior to crystal formation, it becomes more transparent when exposed during lasers exposure while also reducing its effect on electron movement within the device's semiconductor structure. Additionally, there are technical benefits such as lowered crystalinity at certain areas with less absorption than other parts of the same chip due to increased electric field strength near these specific points. Overall, this innovation improves the overall quality of transistors made from silicone materials.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the efficiency or effectiveness of displays with improved image clarity while also maintaining stable operation over time without losing any significant amount of data being displayed through them.

Method used

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  • Manufacturing methods and manufacturing apparatuses of display panel and thin film transistor
  • Manufacturing methods and manufacturing apparatuses of display panel and thin film transistor
  • Manufacturing methods and manufacturing apparatuses of display panel and thin film transistor

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Embodiment Construction

[0042] The specific structural and functional details disclosed herein are merely representative and are used to describe the exemplary embodiments of the present application. However, the present application can be implemented in many replacements, and should not be construed as limited to the embodiments set forth herein.

[0043] In the description of this application, it is to be understood that the term "center", "horizontal", "upper", "lower", "left", "right", "vertical", "horizontal", "top", The orientation or position of "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is merely described herein, rather than indicating or implies the device referred to. Or components must have specific orientation, constructive and operated in a specific orientation, so it is not understood to limit the limitations of the present application. Moreover, the term "first", "second" is used only for the purpose of describing,

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Abstract

The invention discloses manufacturing methods and manufacturing apparatuses of a display panel and a thin film transistor. The manufacturing method of the thin film transistor comprises the followingsteps of: forming an uncrystallized active layer on a substrate; forming a shading layer on the active layer; and carrying out crystallization processing on the active layer by using laser above the shading layer. The width of the shading layer is smaller than that of the corresponding active layer. According to the manufacturing method of the thin film transistor of the invention, the shading layer is arranged above an auxiliary layer before the active layer is crystallized, and then a laser-induced junction is used for enabling the active layer to have an uncrystallized region, and the region can effectively inhibit the leakage current of the device, so that the switching ratio of the device can be increased, and the stability of the device is improved.

Description

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Claims

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Application Information

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Owner BEIHAI HKC OPTOELECTRONICS TECH CO LTD
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