Image Sensor with Color Filters and Method of Manufacturing the Same

a color filter and image sensor technology, applied in the field of image sensors, can solve the problems of deteriorating uniformity of light with a wavelength range transmitted through the microlenses, and achieve the effect of improving a sensitivity of the image sensor and reducing a distan

Inactive Publication Date: 2008-12-04
SILICONFILE TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The technical effect of this patented technology relates to making better quality images captured with cameras or other imagers more sensitive than traditional methods while also minimizing any distortion caused during capturing due to differences between different colors being taken up on each pixel's surface. This results from uniformly distributing tiny lenslets throughout colored layers instead of having them stepped out over multiple steps like create flat surfaces for micro-lens arrays.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving consistency when producing high-quality images sensors that have colored filters containing different materials or layers without causing unevenness over time due to variations during processing steps such as repeating coatings and development process.

Method used

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  • Image Sensor with Color Filters and Method of Manufacturing the Same
  • Image Sensor with Color Filters and Method of Manufacturing the Same
  • Image Sensor with Color Filters and Method of Manufacturing the Same

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Embodiment Construction

[0015]Hereinafter, the present will be described in detail with reference to accompanying drawings.

[0016]FIG. 2 is a cross sectional view illustrating an image sensor with color filters according to an embodiment of the present invention. FIG. 3 is a cross sectional view illustrating an image sensor with color filters according to another embodiment of the present invention.

[0017]Referring to FIGS. 2 and 3, the image sensor with color filters according to the embodiment of the present invention includes a silicon substrate 210, a plurality of photodiodes 220 that is formed in the silicon substrate 210, an interlayer insulating SiO2 layer 230 that is formed on the silicon substrate 210, metal wires 240 that is formed in the interlayer insulating SiO2 layer, a plurality of color filters 250, 260, and 270 of green, red, and blue that are formed in the interlayer insulating SiO2 layer from the surface of the interlayer insulating SiO2 layer to a predetermined depth, and a plurality of micr

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Abstract

An image sensor with color filters capable of minimizing a distance through which incident light reaches photodiodes and flattening the color filters by minimizing step heights among color filters, and a method of manufacturing the same are provided. In the image sensor with the color filters, a metal is doped into an interlayer insulating SiO2 layer opened through a photosensitive film, and the color filters of red, green, and blue are formed in the interlayer insulating SiO2 layer through a heat treatment. In this case, a color filter array can be flattened by removing step heights among color filters generated in an conventional method in which the interlayer insulating SiO2 layer is sequentially coated with the color filters of red, green, and blue so as to form a color filter array. In addition, the distance through which the incident light reaches the photodiodes can be reduced by forming the color filters in the interlayer insulating SiO2 layer, thereby improving the sensitivity of the image sensor.

Description

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Claims

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Application Information

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Owner SILICONFILE TECH INC
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