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4 results about "Conducting channel" patented technology

LDMOS (Laterally Diffused Metal Oxide Semiconductor) device with transverse composite buffer layer structure

InactiveCN102184963AImprove performanceImprove pressure resistanceSemiconductor devicesHigh energyIon implantation
The invention relates to an LDMOS (Laterally Diffused Metal Oxide Semiconductor) device with a transverse composite buffer layer structure, belonging to the technical field of power semiconductors. In the invention, the transverse composite buffer layer structure is introduced into an electric conducting channel region in a drift region of a conventional LDMOS device; the transverse composite buffer layer structure consists of an N-type doped pillar region and a P-type doped pillar region which are transversely arrayed at intervals; and the N-type doped pillar region and the P-type doped pillar region are parallel to the current direction between a source electrode and a drain electrode of the whole device. In the invention, the transverse composite buffer layer structure is adopted to ensure that the pressure-resistant performance of the device can be improved and the specific on-resistance of the device is reduced; when the device is manufactured, a plurality of high-energy ion implantations and knot pushing are adopted to respectively form the N-type doped pillar region and the P-type doped pillar region; the composite buffer layer is of a transverse structure; and therefore, the N-type doped pillar region and the P-type doped pillar region with better process consistency can be obtained, the problem that the concentration of a conducting layer among multilayer doped buried layers in a longitudinal composite buffer layer structure is reduced is not caused and the LDMOS device with more excellent performances is obtained.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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