3 results about "Graphical display" patented technology

Disclosed is a manufacturing method of a micro spring mechanics sensor used for the film performance test in the testing technology field; the method includes the steps that: the metal Ti layer is sputtered on the glass sheet and processed with oxidation treatment; the whirl coating of negative photoresist, front drying and development are processed on the glass sheet after the sputtering and oxidation treatment; the graphical display of the photoresist structure is realized according to the shape of the micro spring mechanics sensor designed by the mask plate; the Ni spring layer is electroformed on the processed titanium oxides layer; the micro spring mechanics sensor is processed with flatness machining; the sedimentation of the aligning marking and the displacement marking is processed on the Ni electroplated coating through the electrodeposition technology; the micro spring mechanics sensor is finally obtained after negative photoresist, the residual glass and the Ti sputtering layer are removed. The micro spring mechanics sensor prepared by the manufacturing method in the invention has the advantages of good linearity, simple process, high resolution, low cost and being easy to be integrated with the film mechanics performance test system.