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4 results about "Reticle" patented technology

A reticle, or reticule (from Latin reticulum, meaning 'net'), also known as a graticule (from Latin craticula, meaning 'gridiron'), is a pattern of fine lines or markings built into the eyepiece of a sighting device, such as a telescopic sight in a telescope, a microscope, or the screen of an oscilloscope, to provide measurement references during visual examination. Today, engraved lines or embedded fibers may be replaced by a computer-generated image superimposed on a screen or eyepiece. Both terms may be used to describe any set of lines used for optical measurement, but in modern use reticle is most commonly used for gunsights and such, while graticule is more widely used for the oscilloscope display, microscope slides, and similar roles.

Reticle stage balance block combined centroid anti-drifting movement control method

ActiveCN105676597AEliminate the effects ofDrift does not occurPhotomechanical exposure apparatusMicrolithography exposure apparatusRelative displacementMovement control
The invention relates to a reticle stage balance block combined centroid anti-drifting movement control method. The method comprises the steps that a relative displacement signal of a balance block relative to the y direction of a base station and a relative displacement signal of a coarse moving station relative to the y direction of the balance block are obtained respectively by adopting absolute grating rulers; a balance block and coarse moving station combined centroid displacement signal is obtained by calculating the displacement signals and serves as a feedback signal, nonlinear variable gain anti-drifting control is conducted on the balance block, and therefore the combined centroid position remains unchanged. According to the reticle stage balance block combined centroid anti-drifting movement control method, the influence of reactive force of a coarse moving station linear motor on the base station can be effectively eliminated, the combined centroid anti-drifting movement control method not only can ensure the balance block not to produce drifting exceeding the limit range in the coarse moving station linear motor moving process, but also can prevent larger reactive force from being transferred to the base station.
Owner:TSINGHUA UNIV +1

Spin torque MRAM fabrication using negative tone lithography and ion beam etching

ActiveUS20170062708A1Magnetic-field-controlled resistorsPhotomechanical apparatusResistLithographic artist
A method for forming a memory device includes masking a photoresist material using a reticle and a developer having a polarity opposite that of the photoresist to provide an island of photoresist material. A planarizing layer is etched to establish a pillar of planarizing material defined by the island of photoresist material. A metal layer is etched to form a metal pillar having a diameter about the same as the pillar of planarizing material. A memory stack is etched to form a memory stack pillar having a diameter about the same as the metal pillar. A magnetoresistive memory cell includes a magnetic tunnel junction pillar having a circular cross section. The pillar has a pinned magnetic layer, a tunnel barrier layer, and a free magnetic layer. A first conductive contact is disposed above the magnetic tunnel junction pillar. A second conductive contact is disposed below the magnetic tunnel junction pillar.
Owner:INT BUSINESS MASCH CORP
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