4 results about "Vacuum evaporation" patented technology

The invention relates to a manufacture method for P-type ZnO ohim electrode, which comprises: depositing Ni on P-type ZnO with vacuum evaporation device to form the first layer of Ni electrode material; depositing Au to form the second Au layer of electrode material as electrode; taking rapid hot annealing to prepared electrode in nitrogen at low temperature to reduce potential barrier height between metal and semiconductor interface for the atom mutual diffusion and achieve ohim contact. This invention can improve greatly the ohim property and reliability of electrode.

The embodiment of the invention discloses a vacuum evaporation device and a vacuum evaporation method. The vacuum evaporation device comprises a magnetic plate used for attracting a metal mask plate,the magnetic plate comprises a central magnetic plate unit and at least one peripheral magnetic plate unit located on the periphery of the central magnetic plate unit, wherein the central magnetic plate unit and the peripheral magnetic plate unit are independently and movably arranged relative to the metal mask plate. According to the technical scheme, the metal mask plate is sequentially attracted by utilizing the center magnetic plate unit and the peripheral magnetic plate unit which are independently arranged correspondingly, the flatness of the metal mask plate can be guaranteed, and therefore the evaporation yield can be improved.

The invention relates to the technical field of evaporation, and discloses a vacuum evaporation device capable of double-sided coating, which comprises an evaporation box, an evaporation source is arranged on the inner bottom wall of the evaporation box, a rotating disc is rotatably arranged in the evaporation box, and a vertical cylinder is fixedly mounted at the edge of the bottom of the rotating disc. Two second bevel gears are oppositely arranged on the inner wall of the vertical cylinder, a loading plate is detachably mounted between the two second bevel gears, and a base plate is arranged on the loading plate; the evaporation source is used for coating the substrates on the loading plate, when double-sided coating is needed, the driving motor is controlled to operate, on one hand, the loading plate can rotate around the vertical shaft through operation of the driving motor, coating of the substrates is more uniform, on the other hand, the loading plate can rotate between the two second bevel gears, and the automatic turning-over effect is achieved; and the other surface of the substrate can be automatically coated, so that the coating effect is better.