Precision improvement calibrating method for current vortex sensor

A technology of eddy current sensor and calibration method, which is applied in the direction of using electric/magnetic devices to transmit sensing components, instruments, and electric devices, etc., which can solve problems such as cost increase, eliminate large errors, improve measurement accuracy, and simplify errors The effect of the correction process

Inactive Publication Date: 2010-08-04
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the accuracy of commercial eddy current sensors is usually 10 μm, and the cost will increase significantly when the accuracy exceeds 4 μm.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] A calibration method for improving the accuracy of an eddy current sensor, specifically comprising the following steps:

[0021] (1) Select a high-precision measuring instrument as a reference standard to calibrate the measurement accuracy of the selected eddy current sensor, that is, use a high-precision measuring instrument and an eddy current sensor to measure the displacement at the same time, that is, the distance between the sensor and the measured object, and use a high-precision measuring instrument The measured displacement value is taken as the true value, compared with the displacement value measured by the eddy current sensor, the functional relationship between the output voltage variable of the eddy current sensor and the displacement variable is established, the calibration function of the eddy current sensor is obtained, and the standard deviation of the calibration function is calculated , which is the error parameter of the calibration function; at this...

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PUM

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Abstract

The invention discloses a precision improvement calibrating method for a current vortex sensor, which is used for calibrating precision by finding an optimal linear range in which the current vortex sensor can meet requirements so that the current vortex sensor measures at the highest precision in the range meeting the requirements and the established mathematical models are simultaneously minimum. The invention has the advantages of convenient use, high stability and good economical efficiency and furthest utilizes the existing measuring range of the current vortex sensor on the basis of improving the precision of the sensor. A method in the greatest range simplifies the error correction process of the sensor and achieves the purpose of improving the measuring precision by using minimum mathematical models.

Description

technical field [0001] The invention relates to the field of a sensor precision improvement method, in particular to a precision improvement calibration method for obtaining an optimal working range of an eddy current sensor. Background technique [0002] The eddy current sensor uses the principle of eddy current to achieve displacement measurement by changing the inductance and impedance of the sensor coil due to the difference in the relative position between the sensor coil and the measuring metal. The eddy current sensor is widely used in the measurement of axial, radial displacement and dynamic displacement in the high-speed motion state on the production line due to its non-contact measurement method, strong anti-interference ability, high measurement accuracy, and good dynamic response. However, the temperature change of the eddy current probe, the fluctuation of the current and the complexity of the electromagnetic field make it difficult for the measurement accuracy...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01D5/14G01D18/00
Inventor 苗恩铭王鑫颜炎
Owner HEFEI UNIV OF TECH
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