Method for recycling residual sintering raw materials after growth of silicon carbide crystals

A technology of crystal growth and silicon carbide, applied in the direction of crystal growth, single crystal growth, single crystal growth, etc., can solve problems such as complex methods

Pending Publication Date: 2021-09-07
哈尔滨科友半导体产业装备与技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In the current growth process, the powder is not fully utilized, and there will be some solids left after the growth is completed

Method used

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  • Method for recycling residual sintering raw materials after growth of silicon carbide crystals

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Experimental program
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specific Embodiment approach 1

[0027] A method for reusing remaining sintered raw materials after growing silicon carbide crystals, comprising the steps of:

[0028] Step 1. Divide the remaining sintered raw materials after silicon carbide crystal growth in the crucible into graphitization area 1, partial graphitization area 2, and low graphitization area 3, for use;

[0029] Step 2, take the remaining sintered raw materials in the low graphitization area, and make a cylindrical polycrystalline rod for use;

[0030] Step 3, weighing the mass of the cylindrical polycrystalline rod obtained in step 2, then weighing 1-1.5 times the mass of silicon carbide powder for use;

[0031] Step 4. Put the silicon carbide powder weighed in step 3 into the crucible, and then slowly insert the cylindrical polycrystalline rod into the center of the crucible. The insertion depth of the cylindrical polycrystalline rod is such that the upper end of the cylindrical polycrystalline rod is in contact with the silicon carbide The to

specific Embodiment approach 2

[0044] A method for reusing remaining sintered raw materials after growing silicon carbide crystals, comprising the following steps:

[0045] Step 1. Dividing the remaining sintered raw materials after silicon carbide crystal growth in the crucible into graphitized regions, partially graphitized regions, and low graphitized regions for use;

[0046] Step 2, taking the remaining sintered raw materials in the low graphitization area to make a cylindrical polycrystalline rod for use;

[0047] Step 3, weighing the mass of the cylindrical polycrystalline rod obtained in step 2, then weighing 1-1.5 times the mass of silicon carbide powder for use;

[0048] Step 4. Put the silicon carbide powder weighed in step 3 into the crucible, and then slowly insert the cylindrical polycrystalline rod into the center of the crucible. The insertion depth of the cylindrical polycrystalline rod is such that the upper end of the cylindrical polycrystalline rod is in contact with the silicon carbide Th

specific Embodiment approach 3

[0054] According to a method for reusing the remaining sintered raw materials after silicon carbide crystal growth described in the second embodiment, the low graphitization region in step 1 is a cylinder with the center point of the crucible as the center, and the radius length of the cylinder is 0.1 -0.75 times the radius of the crucible, the height of the cylinder is 0.2-0.8 times the height of the crucible.

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Abstract

The invention discloses a method for recycling residual sintering raw materials after growth of silicon carbide crystals, and belongs to the field of recycling of residual sintering raw materials after crystal sintering. The technical problem to be solved by the invention is to simply and efficiently utilize residual sintering raw materials after crystal growth. The method comprises the following steps: taking residual sintering raw materials in a low graphitization area after growth of silicon carbide crystals in a crucible to prepare a cylindrical polycrystalline rod, weighing 1-1.5 times by mass of silicon carbide powder, putting the silicon carbide powder into the crucible, slowly inserting the cylindrical polycrystalline rod into the central position of the crucible, and when the insertion depth of the cylindrical polycrystalline rod is such that the upper end of the cylindrical polycrystalline rod is flush with the top of the silicon carbide powder, completing adding of the powder in the crucible; and bonding seed crystals on a crucible cover, covering the crucible cover, putting the crucible into a crystal growth furnace for crystal growth at growth temperature of 2100-2400 DEG C for 60-80 hours under argon atmosphere pressure of 10<-1>-10<-3> atm . The crystal prepared by the method is higher in quality.

Description

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Claims

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Application Information

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Owner 哈尔滨科友半导体产业装备与技术研究院有限公司
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