Niobium alloy sputtering target material and preparation method thereof

[0027] A method for preparing a niobium alloy sputtering target, in terms of parts by mass, the niobium alloy sputtering target contains 40-80 parts of niobium element and 20-60 parts of titanium element;

[0028] The preparation method of niobium alloy sputtering target mainly includes the following steps:

[0029] Step 1. In terms of parts by mass, take 40-80 parts of niobium powder, 20-60 parts of titanium powder, and 0.1-0.3 parts of activated carbon powder. The purity of niobium powder and titanium powder is not less than 99.9%, and pass through a 200-mesh sieve ; The purity of activated carbon powder is not less than 99.9%, pass through a 100-mesh sieve, put it in a V-shaped mixer under the atmosphere of protective gas, pass argon as the protective gas, and mix according to the ball-to-material ratio of 1:1~1.5 material, the mixing time is 12~48h and fully mixed to obtain mixed powder;

[0030] Step 2. Put the mixed powder obtained in Step 1 into the rubber sleeve, vibrate

[0037] A method for preparing a niobium alloy sputtering target, comprising the following steps:

[0038] Step 1: Add niobium powder and titanium powder into the V-type mixer in proportions of 60 parts and 40 parts by mass respectively, and add activated carbon powder with a total weight ratio of 0.2% of the metal powder. The purity of niobium powder and titanium powder is not less than 99.9%, and passes through a 200-mesh sieve; the purity of activated carbon powder is not less than 99.9%, and passes through a 100-mesh sieve. Argon is passed through the mixer as a protective gas, and the mixer is started and mixed for 18 hours and then shut down to obtain a mixed powder;

[0039] Step 2: Select a suitable size rubber sleeve according to the needs, put the mixed powder obtained in step 1 into the rubber sleeve, and shake it while loading. After filling the powder, seal the rubber sleeve, and then shape the rubber sleeve so that The rubber sleeve keeps the shape of a rectangular

[0045] A method for preparing a niobium alloy sputtering target, comprising the following steps:

[0046] Step 1: Add niobium powder and titanium powder into the V-type mixer in proportions of 70 parts by mass and 30 parts by mass, and add activated carbon powder with a weight ratio of 0.3% of the total metal powder. The purity of niobium powder and titanium powder is not less than 99.9%, and passes through a 200-mesh sieve; the purity of activated carbon powder is not less than 99.9%, and passes through a 100-mesh sieve. Argon is passed through the mixer as a protective gas, and the mixer is started and mixed for 18 hours and then shut down to obtain a mixed powder;

[0047]Step 2: Select a suitable size rubber sleeve according to the needs, put the mixed powder obtained in step 1 into the rubber sleeve, and shake it while loading. After filling the powder, seal the rubber sleeve, and then shape the rubber sleeve so that The rubber sleeve keeps the shape of a cuboid; put the po