Pulse laser deposition based preparation method of phase change film
一种脉冲激光沉积、薄膜的技术,应用在离子注入镀覆、金属材料涂层工艺、涂层等方向,能够解决高光波传输损耗等问题
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[0038] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and implement it, but the examples given are not intended to limit the present invention.
[0039] Ge based on pulsed laser deposition (PLD) in preferred embodiments of the present invention 2 Sb 2 Se 4 Te 1 The preparation method of the thin film is based on the pulsed laser deposition equipment, including the following steps: under vacuum conditions, the laser is used to irradiate the rotating target for pre-targeting, and then deposit Ge on the rotating silicon substrate. 2 Sb 2 Se 4 Te 1 film. refer to figure 1 , the pulsed laser deposition equipment is equipped with a rotating target 1, a rotating silicon substrate 2, a vacuum pump 3, a laser window 5 and other structures, and 4 is incident laser light.
[0040] In some embodiments, deposited Ge 2 Sb 2 Se ...
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