Capacitor electrode, capacitor and preparation method thereof
A capacitor electrode and electrode technology, which is applied in the direction of fixed capacitor electrodes, capacitor manufacturing, capacitors, etc., can solve the problems of small surface area of the lower electrode, small capacitor storage capacity, poor data storage performance of semiconductor devices, etc., to prevent graphics from collapsing and increasing Surface area, performance-enhancing effect
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[0046] In order to make the purposes, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0047] In a first aspect, this embodiment provides a capacitor electrode that combines figure 1 , the capacitor electrode includes: the lower electrode 5 . The lower electrode 5 includes a plurality of stage portions 51, the plurality of stage portions 51 are connected in sequence from bottom to top, and the cross-sec
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