Nitride-based electronic device and method for manufacturing same

[0038]FIG. 1 is a cross-sectional view illustrating a part of a nitride-based electronic device according to a first exemplary embodiment of the present invention.

[0039]As shown in FIG. 1, the nitride-based electronic device according to the first exemplary embodiment includes a substrate 11, a channel layer 12 formed on the substrate 11, a barrier layer 13 formed on the channel layer 12, a first protection layer 14 disposed on the barrier layer 13 to expose a partial region of the barrier layer 13, a drain electrode 20 disposed on the barrier layer 13 exposed by the first protection layer 14, a second protection layer 30 disposed to cover an entire upper surface of the first protection layer 14 and a partial peripheral portion of an upper surface of the drain electrode 20, a drain electrode pad 40 disposed on the upper surface of the drain electrode 20 and a portion of the second protection layer 30 on the peripheral portion of the drain electrode 20, a third protection layer 50 confi

[0065]FIG. 3 is a cross-sectional view illustrating a nitride-based electronic device according to a second exemplary embodiment of the present invention.

[0066]Referring to FIG. 3, the nitride-based electronic device according to the second exemplary embodiment of the present invention is illustrated as further including a source electrode 70, a gate electrode 80, and a field plate 90 unlike the first exemplary embodiment shown in FIG. 1

[0067]FIG. 3 shows that, in a stacked structure of multiple protection layers, which is a characteristic configuration of the present invention, structures of upper protection layers, which completely cover protection layers disposed thereunder, are not limited to being formed on a drain electrode pad.

[0068]It may be understood that the field plate 90, which is in contact with an upper portion of the source electrode 70 and extends to an upper portion of a third protection layer 50 above the gate electrode 80, also functions as a source electrode pad (n