Method for manufacturing a liquid crystal display

a liquid crystal display and manufacturing method technology, applied in the field of liquid crystal display manufacturing, can solve the problems of high manufacturing cost, complicated manufacturing process, low productivity, etc., and achieve the effects of sharply reducing manufacturing costs, reducing the number of photolithography processes, and improving manufacturing yield

Inactive Publication Date: 2006-08-01
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a method for making a semiconductor device with improved efficiency and reduced cost. By creating a gate electrode that has two layers: one made from refractory metals like molybdenum or tantalum, and another layer made from aluminum, this method reduces the number of photomasks needed while also increasing production yields. Additionally, the use of these materials helps prevent damage caused during subsequent processing steps such as etching.

Problems solved by technology

The technical problem addressed in this patent is how to improve the efficiency and cost-effectiveness of producing thin films made from materials like gallium or indium phosphorus, while also simplifying the manufacture process and improving productivity.

Method used

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  • Method for manufacturing a liquid crystal display
  • Method for manufacturing a liquid crystal display
  • Method for manufacturing a liquid crystal display

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Embodiment Construction

[0029]FIG. 6 is a schematic plan view of the mask patterns used for manufacturing a liquid crystal display according to the present invention, in which reference numeral 100 denotes a mask pattern for forming a gateline; reference numeral 105 denotes a mask pattern for forming a gate pad; reference numeral 110 denotes a mask pattern for forming a data line, reference numeral 115 denotes a mask pattern for forming a data pad; reference numeral 120 denotes a mask pattern for forming a semiconductor film; reference numeral 130 denotes a mask pattern for forming a source electrode / drain electrode; reference numeral 140 denotes a mask pattern for forming a contact hole for connecting a pixel electrode to the drain electrode in the TFT area; reference numeral 145 denotes a mask pattern for forming a contact hole for connecting a gate pad in the pad area to the pixel electrode; reference numeral 150 denotes a mask pattern for forming a pixel electrode in the TFT area; and reference numeral

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Abstract

A method for manufacturing a liquid crystal display which reduces the number of photolithography processes is provided. The method includes the steps of forming a gate electrode and a gate pad by depositing a first metal film and a second metal film on a substrate of a TFT area and a gate-pad connecting area, respectively, in the described order, by a first photolithography process, forming an insulation film on the entire surface of the substrate on which the gate electrode and the gate pad are formed, forming a semiconductor film pattern on the insulating film of the TFT area by a second photolithography process, forming a source electrode/drain electrode and pad electrode composed of a third metal film using a third photolithography process in the TFT portion and pad portion, respectively, forming a passivation film pattern which exposes a portion of the drain electrode, a portion of the gate pad, and a portion of the pad electrode by a fourth photolithography process, exposing the first metal film by etching the second metal film which constitutes the gate pad using the passivation film pattern as a mask, and forming a pixel electrode connected to the drain electrode of the TFT area for connecting the gate pad of the gate-pad connecting area to the pad electrode of the pad area using a fifth photolithography process. Therefore, it is possible to reduce the number of photolithography processes, to improve the manufacturing yield, and to suppress growth of a hillock of an Al film.

Description

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Claims

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Application Information

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Owner SAMSUNG DISPLAY CO LTD
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