3 results about "Direct bonding" patented technology

The invention discloses a ceramic support for pre-oxidating a copper sheet. The ceramic support comprises a ceramic sheet body and copper foils; ceramic bending parts are arranged at two ends of the ceramic sheet body; the copper foils are attached to the inner surfaces of the ceramic sheet body and the ceramic bending parts; the central lines of the copper foils are coincided with the folding marks of the connecting parts of the ceramic sheet body and the ceramic bending parts; the ceramic bending parts are vertical to the ceramic sheet body. The ceramic sheet body and the ceramic bending parts are 0.635mm thick; the copper foils are 0.1-0.4mm thick. According to the ceramic support for pre-oxidating the ceramic sheet, the copper sheet is directly placed on the support to be oxidated instead of being placed on a conveyor belt to be pre-oxidated with one surface, so a certain dangling degree exists between the copper sheet and the conveyor belt, the smooth flowing of oxygen is ensured, and double surfaces of the copper sheet are uniformly oxidated. The surface grain state after the product is sintered is improved, and the roughness is uniform. According to the ceramic support for pre-oxidating the copper sheet, the ceramic sheet made of Al2O3 and the copper foils are adopted as the making material of a jig which is made with a DBC (Direct Bonding Copper) method, and the jig is simple in structure and durable.

A high-sensitivity surface acoustic wave absolute pressure sensor comprises: a pressure sensing diaphragm, a surface acoustic wave resonator, a middle layer, a pressure reference cavity and a cover plate, wherein the middle layer, the pressure sensing diaphragm and the cover plate form an integral structure in a direct bonding or indirect bonding mode, and a pressure reference cavity is formed onthe integral structure; the surface acoustic wave resonator is arranged on the inner surface of the pressure sensing diaphragm and located in the center of the pressure sensing area of the pressure reference cavity. The pressure reference cavity is of a rectangular or oval structure, the short side or oval short axis of the rectangular structure is parallel to the propagation direction of surfaceacoustic waves in the surface acoustic wave resonator, the length of the rectangular structure is larger than or equal to that of the surface acoustic wave resonator, and the long side or oval long axis of the rectangular structure is parallel to the acoustic aperture direction in the surface acoustic wave resonator; and bus bars of the surface acoustic wave resonators (2) are connected with output leads. The sensor is high in sensitivity, small in size, simple in processing technology, good in inheritance and good in long-term stability.