5 results about "Liquefaction" patented technology

A resist removing device 1 functions to remove a resist from a substrate while preventing occurrence of popping phenomenon and at the same time attains reduction in cost of energy for the resist removing and has a simplified constitution. The resist removing device 1 is equipped with a chamber 2 for containing therein a substrate 16 (for example, a substrate having a high-doze ion implanted resist), and with a pressure below the atmospheric pressure, the chamber 2 is fed with ozone gas, unsaturated hydrocarbons and water vapor. The ozone gas may be an ultra-high concentrated ozone gas that is produced by subjecting an ozone containing gas to a liquefaction-separation with the aid of a vapor pressure difference and then vaporizing the liquefied ozone. For cleaning the substrate 16 thus treated, it is preferable to use ultra-pure water. The chamber 2 is equipped with a susceptor 15 for holding the substrate 16. The susceptor 15 is heated to a temperature of 100° C. or below. An example of the means of heating the susceptor is a light source that emits infra-red rays.

The invention relates to a low temperature liquefaction vehicle fuel tanker operation box pipeline equipment plugging simulation test bench. The bench includes a pipeline, a first shut-off valve, a second shut-off valve, a shut-off valve-pipe elbow connection plugging device and a shut-off valve stem plugging device, the first shut-off valve and the second shut-off valve are installed in the pipeline, an elbow connection structure is formed between the first shut-off valve and the pipeline, the pipeline is connected with a liquid nitrogen bottle, the shut-off valve-pipe elbow connection plugging device is installed at the elbow connection of the first shut-off valve and the pipeline, and the shut-off valve stem plugging device is mounted on a valve stem of the second shut-off valve. The bench can conduct simulating experiment on the leakage plugging of the internal shut-off valve of a liquefied natural gas tank car operation box, a pipe elbow joint and the shut-off valve stem, and achieve the purpose of verifying the plugging effect.

The invention discloses a core shell separated wound tube heat exchanger, and belongs to the technical field of low temperature heat exchange. The core shell separated wound tube heat exchanger comprises a shell, a sleeve, a center tube, a uniform distributor and an annular sealing section which are sequentially arranged from outside to inside, wherein an annular cavity is formed between the center tube and the shell; the uniform distributor of a groove-shaped disc structure and the annular sealing section are sequentially embedded at the outer part of the sleeve; the annular sealing section is connected with the bottom of the uniform distributor; a plurality of wound tubes are arranged inside the sleeve; one ends of the wound tubes directly stretch out of the bottom of the uniform distributor; the other ends of the wound tubes stretch out of the top of the uniform distributor through gas phase circulation holes; and a plurality of uniformly distributed liquid phase circulation holes and the plurality of symmetrical gas phase circulation holes are formed in the uniform distributor. According to the core shell separated wound tube heat exchanger, the problem that after the heat exchanger is miniaturized, a traditional structure is difficult to process and manufacture can be solved, and the core shell separated wound tube heat exchanger can be utilized in amplification tests of industrial heat exchange devices in natural gas liquefaction.

The invention discloses a cooling device in a natural gas liquefaction process, which includes an air cooler and a radiator opposite to the air cooler, and a heat dissipation pipe is arranged on the radiator; among the radiators, the heat dissipation pipe Auxiliary cooling tanks are respectively provided on both sides of the radiator, which extend parallel to the heat dissipation pipe; multiple micro-air pumps are arranged in the radiator, and the plurality of micro-air pumps are evenly distributed along the auxiliary cooling tank; The cooling device in the liquefaction process can improve the cooling effect of the cooling device, and at the same time increase the actual cooling efficiency of the cooling air flow output by the air cooler, so that the overall energy consumption of the cooling device can be reduced.