1 results about "Silicon oxynitride" patented technology
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Silicon oxynitride is a ceramic material with the chemical formula SiOₓNy. While in amorphous forms its composition can continuously vary between SiO₂ (silica) and Si₃N₄ (silicon nitride), the only known intermediate crystalline phase is Si₂N₂O. It is found in nature as the rare mineral sinoite in some meteorites and can be synthesized in the laboratory.