Penetrating agent generator, chemical vapor deposition reaction device and vapor deposition method

A chemical vapor deposition and reaction device technology, used in chemical vapor deposition method, preparation of aluminized or aluminum and other elements co-infiltration coating, chemical vapor deposition reaction device, infiltration agent generator field, to achieve a wide range of working temperature, variety many effects

Pending Publication Date: 2022-03-08
WUHAN RES INST OF MATERIALS PROTECTION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is used to prepare the infiltration agent required for aluminizing, cobalt or multi-element co-infiltration, and solves the problem

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0020] The embodiments of the present invention will be further described in further detail below with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but cannot be used to limit the scope of the invention.

[0021] Such as Figures 2 to 5 As shown, the present invention provides a bumping generator for a chemical vapor deposition reaction device, comprising a bottom cover 20, a plurality of trays 21, a top cover 23, and a plate 24, from the bottom to top, and a plurality of trays 21, a top cover 23, and a blade 24. 20, the tray 21, the top cover 23, and the plate 24 are reserved by the edge 32 of the projection 32, wherein the bottom cover 20 is provided with an air intake port 17, and each tray 21 is close to the edge. 32 There is a venting hole 27 that implements the up and down, the vent hole 27 on the adjacent tray 21 is disposed relatively, to form a folding airway; the top cover 23 is provided with an air out

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PUM

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Abstract

The invention discloses a permeating agent generator, a chemical vapor deposition reaction device and a vapor deposition method.The permeating agent generator is formed by a bottom cover, a plurality of trays, a top cover and a gas distribution plate which are arranged in a stacked mode, and solid alloy permeating agents can be contained in the trays; the chemical vapor deposition reaction device is formed by installing a permeating agent generator in a segmented heating vapor deposition reaction chamber, a workpiece is placed above the permeating agent generator in the vapor deposition reaction chamber, a heating device is started for segmented heating, then process gas is introduced, the process gas enters the permeating agent generator and is heated, and the chemical vapor deposition reaction device is formed. And the process gas is in contact with the solid alloy permeating agent to become a gaseous permeating agent, and the modified aluminide coating is prepared on the surface of the workpiece in the vapor deposition reaction chamber. According to the preparation method, the number of the trays, the placing positions of the raw materials and the types of the raw materials can be adjusted according to the needed gaseous permeating agents, various different gaseous permeating agents can be prepared at the temperature of 450-1000 DEG C, and the requirements of different types of alloy modified aluminum coatings can be met.

Description

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Claims

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Application Information

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Owner WUHAN RES INST OF MATERIALS PROTECTION
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