Semiconductor structure and semiconductor device

A semiconductor and device technology, applied in the field of semiconductor structures and semiconductor devices, to prevent the effect of affecting the test effect

Pending Publication Date: 2022-03-11
WUHAN XINXIN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The technical effects described in this patented technology include improved performance and reliability when manufacturing electronic devices with mixed-metal structures or wafers containing multiple layers of metals like Al/Cu, while avoiding damage caused by contact with other components such as gold plating on these circuits due to their exposure to airborne particles generated during production processes. Additionally, the use of nonmagnetic conductive material instead of magnetic ones improves signal quality even further.

Problems solved by technology

The technical problem addressed in this patented text relates to improving the efficiency at which electronic devices communicate data over large distances without consuming too much energy during testing procedures due to increased interference between different types of signals caused by differences in distance from each other. This issue arises when trying to achieve more efficient connections within smaller spaces while also maintaining good thermal conductivity characteristics.

Method used

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  • Semiconductor structure and semiconductor device
  • Semiconductor structure and semiconductor device
  • Semiconductor structure and semiconductor device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] figure 1 This is a schematic structural diagram of the semiconductor structure provided in this embodiment. like figure 1 As shown, the semiconductor structure includes a plurality of first chips 10 and a wafer 20, the first chips 10 are bonded on the surface of the wafer 20 by hybrid bonding, and the first chips 10 and the The wafers 20 may be bonded together face-to-face.

[0042]Further, there is a gap 300 between two adjacent first chips 10 , the wafer 20 has a dicing area (not shown) for forming a dicing line, and the gap 300 is aligned and exposed The cutting area is subsequently cut through the cutting area on the wafer 20 to cut the semiconductor structure into individual bonding sheets, one bonding sheet corresponding to a second chip on the wafer 20 and a For the first chip 10, a semiconductor device can be formed after the bonding sheet is packaged. figure 1 Only three of the first chips 10 are schematically shown in the figure, and the gaps 300 between two

Embodiment 2

[0079] Figure 4 This is a schematic structural diagram of the semiconductor structure provided in this embodiment. like Figure 4 As shown, the difference from the first embodiment is that in this embodiment, the first interconnection structure layer has two, which are the first interconnection structure layer 110a and the first interconnection structure layer 110b respectively. Specifically, the first interconnect structure layer 110a is located on the first surface 100a of the first substrate 100 and covers the first surface 100a of the first substrate 100, and the first interconnect structure layer 110b is connected to the first surface 100a of the first substrate 100. The first hybrid bonding layer 120 is sequentially formed on the second surface 100b of the first substrate 100 and covers the second surface 100b of the first substrate 100, image 3 , the first interconnect structure layer 110a, the first substrate 100, the first interconnect structure layer 110b, and the f

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Abstract

The invention provides a semiconductor structure and a semiconductor device. In the semiconductor structure and the semiconductor device, a first bonding pad group in a first mixed bonding layer of a first chip and bonding pads in a second bonding pad group in a second mixed bonding layer of a wafer are correspondingly bonded; at least one bonding pad in the at least one second bonding pad group is located in the gap between the two adjacent first chips, and the bonding pads located in the gap are exposed, so that the bonding pads can be directly punctured for electrical testing.

Description

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Claims

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Application Information

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Owner WUHAN XINXIN SEMICON MFG CO LTD
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