Method Of Producing Film And Method Of Producing Ink-Jet Head

a production method and inkjet head technology, applied in the direction of printing, pressure inorganic powder coating, coating, etc., can solve the problems of film damage, film even destruction, fault or defect generation in film, etc., to prevent the destruction of film, improve the quality of film formation performance and the quality of formed film, and suppress the amount of gas generated

Inactive Publication Date: 2007-03-01
BROTHER KOGYO KK +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technical effect relates to reducing damage caused during manufacturing processes involving ceramics with low melting points without adding excessively large amounts of other materials. Additionally, certain types of ceramites have lower levels of residual hydroxylic acid compared to regular ones while others exhibit higher values indicating they may contain impurities associated with their constituents. These properties help improve the durability and reliability of films made through thermal decomposition techniques.

Problems solved by technology

The technical problem addressed during these tests on certain types of films made from PZT materials involves generating cracks due to heating treatments applied after formation of the desired crystal structure. This can lead to reduced performance and reliability issues with electronic devices utilizing them.

Method used

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Examples

Experimental program
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examples

[0067] Next, the present invention will be explained in further detail by examples.

Examples and Comparative Examples for Investigating the Effect on the Film by the Presence or Absence of Heating Treatment to the Material Particles

example 1-1

1. Formation of Film

(1) Preparation of Ceramic Particles

[0068] As the material, α-alumina (obtained from Showa Denko Kabushiki Kaisha) was pulverized with a ball mill to obtain fine powder of α-alumina having a mean particle diameter of about 1 μm and a particle size distribution as shown in FIG. 10. The particle size distribution was measured by using a dry type particle-size distribution measuring apparatus (HELOS & RODOS, manufactured by Japan Laser Corporation). This fine powder was placed in a muffle furnace (FP100, manufactured by Yamato Scientific Co., Ltd.), and the temperature in the furnace was raised up to 600° C. by taking one hour. After holding the temperature at 600° C. for one hour, the inside of the furnace was cooled by natural cooling, and the fine powder was taken out. FIG. 10 also shows a particle size distribution of α-alumina after the heating treatment.

(2) Film Formation

[0069] Stainless steel plate (SUS430) was used as the substrate, and the α-alumina pow

example 1-2

[0072] Particles of α-alumina were prepared and a film was formed in a similar manner as in Example 1-1 except that the thickness of the formed insulating film was 1 μm, and the measurement was performed.

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Abstract

A method of producing a film includes: a heating treatment step of performing a heating treatment for ceramic particles; a film-forming step for forming the film by jetting, onto a substrate, an aerosol containing the ceramic particles which have been subjected to the heating treatment so as to make the ceramic particles adhere to the substrate; and an annealing-treatment step for performing an annealing treatment for the film. Accordingly, it is possible to previously vaporize and remove water and an additive which would otherwise cause gasification in the annealing treatment step, thereby preventing the defect and destruction of the film in the annealing treatment step. Thus, it is possible to provide a piezoelectric actuator plate, for ink-jet head, having satisfactory piezoelectric characteristics.

Description

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Claims

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Application Information

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Owner BROTHER KOGYO KK
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