Vacuum Processing Apparatus and Vacuum Processing Method Using the Same
a vacuum processing and vacuum technology, applied in fluid pressure control, process and machine control, instruments, etc., can solve the problems of deterioration of yield, significant increase in demand for reducing particles, and deterioration of yield, so as to improve the yield of the sample being processed
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[0030]Now, a preferred embodiment of the present invention will be described with reference to the drawings.
[0031]FIG. 1 is a schematic view of a vacuum processing apparatus 100 according to an embodiment of the present invention. The vacuum processing apparatus 100 illustrated in FIG. 1 is roughly divided into a vacuum block 101 and an atmospheric block 102. The atmospheric block 102 includes an atmospheric transfer reactor 108 having an atmospheric transfer robot 109, and on the front side of the atmospheric transfer reactor 108 is disposed a plurality of loading platforms 111 on which are placed a cassette 110 each capable of storing a plurality of samples such as semiconductor wafers and other substrates to be processed in the vacuum processing apparatus 100. The vacuum block 101 comprises a vacuum transfer reactor 112 having a vacuum transfer robot 107 placed therein, and disposed around the side walls of the vacuum transfer reactor 112 are a plurality of vacuum reactors 103 in...
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