Laminate and manufacturing method for same
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Examples 1 to 7 and Comparative Examples 1 and 2
[0132]In Examples 1 to 7 and Comparative Examples 1 and 2, metal sheets and a ceramic sheet were bonded together through spark plasma sintering at different heating temperatures.
[0133]There were provided two metal sheets (2) and (3), each being formed of Al (purity: 99.9 wt. %) and having dimensions of 34 mm in length, 28 mm in width, and 1.0 mm in thickness, as well as one ceramic sheet (4) formed of AlN (containing Y2O3 in an amount of about 5 wt. %) having dimensions of 34 mm in length, 28 mm in width, and 0.635 mm in thickness. The surfaces of the metal sheets (2) and (3) and the ceramic sheet (4) were subjected to degreasing treatment with an organic solvent. Treatment for removal of oxide film was not carried out. Both surfaces of each of the metal sheets (2) and (3) have a surface roughness Ra of 0.3 μm, and both surfaces of the ceramic sheet (4) have a surface roughness Ra of 0.8 μm.
[0134]Subsequently, the metal sheets (2) and (3)
Example
[0138]In Example 8, the layered material (1) according to Embodiment 1 was produced.
[0139]There were provided two metal sheets (2) and (3), each being formed of Al (purity: 99.99 wt. %) and having dimensions of 34 mm in length, 28 mm in width, and 0.6 mm in thickness, as well as one AlN ceramic sheet (4) having dimensions of 34 mm in length, 28 mm in width, and 0.635 mm in thickness. The surfaces of the metal sheets (2) and (3) and the ceramic sheet (4) were subjected to degreasing treatment with an organic solvent. Treatment for removal of oxide film was not carried out. Both surfaces of each of the metal sheets (2) and (3) have a surface roughness Ra of 0.3 μm, and both surfaces of the ceramic sheet (4) have a surface roughness Ra of 0.8 μm.
[0140]Subsequently, the metal sheets (2) and (3) and the ceramic sheet (4) were stacked and placed in a sintering die (10) as shown in FIG. 2 so that the ceramic sheet (4) was disposed between the metal sheets (2) and (3). Graphite punches (11) an
Example
[0143]The procedure of Example 1 was repeated, except that application of pulse current between the electrodes (13) and (14) was carried out in an inert gas (nitrogen) atmosphere, to thereby produce the layered material (1) having a three-layer structure.
[0144]The flatness of both surfaces of the thus-produced layered material (1) was measured and found to be 53 μm. A cross section of the thus-produced layered material (1) was observed for confirming the bonding state between the metal sheets and the ceramic sheet. No defects were observed at the bonding interfaces; i.e., favorable bonding was achieved between these sheets.
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