Semiconductor structure having a high voltage well region

Active Publication Date: 2019-07-25
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
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  • Abstract
  • Description
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  • Application Information

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Benefits of technology

[0005]The present disclosure provides a method for fabricating a semiconductor structure. The method for fabricating a semiconductor structure includes providing a substrate. The method for fabricating a semiconductor structure further includes implanting the substrate to form a high-voltage well (HVW) region having a first conductivity type. The method for fabricating a semiconductor structure further includes forming a pair of drain drift regions in the high-vol

Problems solved by technology

However, the breakdown voltage may degrade as a result.
Therefore, although existing HV devices have generally been adequate for their intended

Method used

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  • Semiconductor structure having a high voltage well region
  • Semiconductor structure having a high voltage well region
  • Semiconductor structure having a high voltage well region

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Embodiment Construction

[0013]The following disclosure provides many different embodiments, or examples, for implementing different features of the disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and / or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and / or configurations discussed.

[0014]Furthermore,

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Abstract

A method for fabricating a semiconductor structure includes providing a substrate. The method further includes implanting the substrate to form a high-voltage well region having a first conductivity type. The method further includes forming a pair of drain drift regions in the high-voltage well region. The pair of drain drift regions are on the front side of the substrate, and the pair of drain drift regions have a second conductivity type opposite to the first conductivity type. The method further includes forming a gate electrode embedded in the high-voltage well region. The gate electrode is positioned between the pair of drain drift regions and laterally spaced apart from the pair of drain drift regions.

Description

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Claims

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Application Information

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Owner VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
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