Curable Composition for Nano-Fabrication

Active Publication Date: 2021-03-25
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0008]A curable composition comprises at least 10 wt % expanding monomers based on a total weight of the curable composition, at least 25 wt % acrylate monomers based on the total weight of the curable composition, a photoinitiator, and a photosensitizer. The

Problems solved by technology

However, known curable compositions, in particular acrylate monomer based compositions, experience volume shrinkage during the curing.
Volume shrinkage in the range of 4-20% ca

Method used

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  • Curable Composition for Nano-Fabrication
  • Curable Composition for Nano-Fabrication
  • Curable Composition for Nano-Fabrication

Examples

Experimental program
Comparison scheme
Effect test

example 1 (

EX1)—47 parts 3,4-Epoxycyclohexylmethyl 3,4-epoxycyclohexanecarboxylate (EHEHC) (expanding monomers), 50 parts isobornyl acrylate (IBOA) (monoacrylate monomers), 2.5 parts diphenyliodonium hexafluorophosphate (DPIPF) (photoinitiator), 0.5 parts 2-isopropylthioxanthone (ITX) (photosensitizer), and 1 part surfactant fluorinated surfactant FS2000M1 made by Wonda Science were combined to form a curable composition. Each of the components are weighted on a balance and placed into an opaque bottle. Next, the components in the bottle are vortex mixed for 1 min and then left on a roller mixer for about 8 hours to form the curable composition.

example 2 (

EX2)—15 parts 1,4-Cyclohexanedione bis(ethylene ketal) (CHDB) (expanding monomers), 85 parts IBOA, 2.5 parts DPIPF, 0.5 parts ITX, and 1 part surfactant were prepared using the same method as in Example 1.

example 3 (

EX3): 79 parts Spiro[1,3-benzodioxole-2,2′(3′H)-furan], octahydro-, (T1, shown below) (expanding monomers), 19 parts of neopentyl glycol diacrylate, 0.9 parts DPIPF, 0.2 parts ITX, and 1.6 part surfactant were prepared using the same method as in Example 1.

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Abstract

A curable composition comprises at least 10 wt % expanding monomers based on a total weight of the curable composition, at least 25 wt % acrylate monomers based on the total weight of the curable composition, a photoinitiator, and a photosensitizer. The acrylate monomers have a molecular weight of 500 or less. The curable composition has a viscosity of 10 cP or less. A total amount of the expanding monomers and the acrylate monomers are at least 90 wt % based on the total weight of the curable composition.

Description

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Claims

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Application Information

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Owner CANON KK
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