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3 results about "Argon flow" patented technology

Argon recovery and purification device and purification method thereof

PendingCN113998678ASwitch in timeControl operationNoble gas purification/separationPurification methodsProcess engineering
The invention relates to the technical field of purification devices, in particular to an argon recovery and purification device and a purification method thereof. According to the technical scheme, the device comprises a device body, a first working set and a second working set are arranged in the device body, a pair of argon flow dividing pipes is fixedly connected in the device body, the two argon flow dividing pipes are located at the two ends of the first working set and the two ends of the second working set respectively, a pair of ventilation openings are formed in each argon flow dividing pipe, and the two ventilation openings are respectively communicated with the first working set and the second working set. Through the arrangement of the first working set and the second working set, uninterrupted argon recovery and purification work can be realized through switching between the first working set and the second working set; the first working set and the second working set can be intelligently and automatically switched, and the micro-oxygen analyzer not only can detect the purification degree of purified argon, but also can judge the working condition of the current working set according to the purity condition.
Owner:ANHUI HUAZHONG SEMICON MATERIALS CO LTD
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