Monolithic integration composite range vector hydrophone
A vector hydrophone, a single-chip integrated technology, is used in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc. It can solve the problems of narrow effective frequency band and cannot measure signals of various frequencies, etc. Band range, broaden the effective working frequency band, overcome the effect of inconsistency
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[0040] The present invention will be further described below in conjunction with accompanying drawing:
[0041] Such as Figures 1 to 3 Shown, a kind of monolithic integrated composite range vector hydrophone, comprises square-shaped bracket 1, elastic beam 2 and the mass blocks 3 in the middle of four small frame bodies that are respectively supported and suspended in square-shaped bracket 1 by elastic beam 2, each The four sides of each mass block 3 are respectively fixed to the square-shaped support 1 by an elastic beam 2, and the end and root of each elastic beam 2 are respectively integrated with a piezoresistor 4 with equal resistance, and two elastic beams located in the X direction The four varistors 4 on the beam 2 form a Wheatstone bridge, and the four varistors 4 on the two elastic beams 2 in the Y direction form a Wheatstone bridge; the four Wheatstone bridges in the X direction The four Wheatstone bridges in the Y direction are arranged in parallel; the middle parts
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