Set of molecular pump blade discs

A molecular pump and moving disc technology, applied in the field of vacuum pump blade design, can solve problems such as low structural strength, broken pump accidents, and easy deformation

Active Publication Date: 2019-03-01
杨建康
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Existing large-diameter molecular pumps have a diameter of up to 400 mm, long blades, low structural strength, and easy deformation that may cause broken pump accidents

Method used

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  • Set of molecular pump blade discs
  • Set of molecular pump blade discs
  • Set of molecular pump blade discs

Examples

Experimental program
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Effect test

Embodiment Construction

[0007] The dynamic and static disks move relative to each other within a distance of less than one millimeter, and the speed is as high as tens of thousands of revolutions. The air molecules sandwiched between the moving and static disks collide and rub against the surface of the moving and static disks, and the leaf disks transmit their kinetic energy to the air molecules. The air molecules that have received kinetic energy scatter outward, and the gas pressure between the moving and static disks becomes lower. The gas pressure in the space on the upper surface of the moving disk is higher than the gas pressure between the moving disk and the static disk, and the gas in the space above the moving disk will move downward through the through holes on the surface of the moving disk. In this way, the extracted gas movement route is sucked from the vacuum chamber to the upper surface of the moving plate, and then passes through the through hole on the moving plate into the gap bet...

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PUM

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Abstract

The invention relates to a set of molecular pump blade discs, and belongs to the technical field of design methods of vacuum pump blades. Blades of a traditional molecular pump are similar to blades of an electric fan, the longer the blades are arranged, the better the air exhaust effect is, meanwhile, the strength of the blades is poor, and the blades are prone to breakage. According to the set of molecular pump blade discs, a movable disc provided with holes and a fixed disc provided with grooves are used for replacing the blades. According to the design, the machining cost is reduced, the heat deformation of the blades is reduced, the structural strength is enhanced, and the air pumping effect is improved. The set of molecular pump blade disc solves the technical problems that for the design problems, technical key points and application of an ultra-large-diameter molecular pump, both the holes in the movable disc and the grooves in the fixed disc have requirements for the size, thenumber and the position. The vacuum pumping effect can be achieved only by using the movable disc and the fixed disc in a cooperative mode. Based on the design, a molecular pump with a larger caliberand a larger pumping speed can be manufactured.

Description

technical field [0001] The invention is a design method of a vacuum pump vane. The blades of traditional molecular pumps are similar to the blades of electric fans. The longer the blades are, the better the air exhaust effect will be. At the same time, the strength of the blades will become weaker and they will easily break. The present invention replaces the blades with the moving disk with holes and the static disk with grooves dug. This design reduces the processing cost, reduces the thermal deformation of the blade, strengthens the structural strength, and improves the air extraction effect. Background technique [0002] The size of the vacuum coating machine is getting bigger and bigger, and the turbomolecular pump for pumping air to the vacuum coating machine is also getting bigger and bigger. The existing large-diameter molecular pumps have a diameter of up to 400 mm, long blades, low structural strength, and easy deformation that may cause broken pump accidents. I...

Claims

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Application Information

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IPC IPC(8): F04D29/28
CPCF04D29/28
Inventor 杨建康
Owner 杨建康
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