Jet plasma gun and plasma device using the same

[0018]Referring to FIG. 1A and FIG. 1B, FIG. 1A shows a plasma device according to a first embodiment of the invention, and FIG. 1B is a partial cross-sectional view of a plasma nozzle in FIG. 1A. The plasma device 100 is for providing a plasma 110 to process a surface of a substrate 130. The plasma device 100 includes a base 150, a jet plasma gun 170 and a cavity 190. The jet plasma gun 170 includes a plasma producer 171 and a plasma nozzle 173. The substrate 130 is placed on a bearing surface of the base 150. The plasma producer 171 is for providing a plasma 110. The plasma nozzle 173 is disposed between the substrate 130 and plasma producer 171 and has a first opening 172 and a second opening 174. The first opening 172 faces plasma producer 171, and the second opening 174 faces the base 150. The cavity 190 is for receiving the base 150 and the plasma nozzle 173. The jet plasma gun 170 is fixed in cavity 190, and the bearing surface of the base 150 is electrically isolated from th...

[0023]The jet plasma gun of the second embodiment of the invention includes a barrier. As for other similarities between the first embodiment and the second embodiment, the same designations are used and are not repeated here.

[0024]Referring to FIGS. 2A and 2B, FIG. 2A shows a jet plasma gun and a substrate according to a second embodiment of the invention, and FIG. 2B is a perspective view of a barrier of the jet plasma gun in FIG. 2A. The jet plasma gun 270 includes a plasma producer 171, a plasma nozzle 173 and a barrier 275. The barrier 275 being an insulator is disposed between plasma nozzle 173 and the substrate 130 and has a through hole 277 corresponding to the second opening 174 (illustrated in FIG. 1B. The plasma 110 passes through the plasma nozzle 173 and the through hole 277 to reach the substrate 130.

[0025]As indicated in FIGS. 1B and 2B, the barrier 275 is coupled to the plasma nozzle 173. The second opening 174 of the plasma nozzle 173 is disposed on a surface 176 of...