Solid state image pickup device, method of manufacturing the same, image pickup device, and electronic device

[0107] First example structure of solid-state image pickup device

[0108] will refer to Figure 3A to Figure 3C A schematic cross-sectional view and a schematic plan layout of . Figure 3A shows the unit pixel at the center of the image corner, Figure 3B shows the unit pixel at the corner edge, Figure 3C A pixel portion including a plurality of unit pixels is shown.

[0109] Hereinafter, reference numeral 1 denotes a solid-state image pickup device, 11 denotes a semiconductor substrate, 12 denotes a photoelectric converter, 14 denotes an interlayer insulating film, 16 denotes a waveguide, 17 denotes a color filter layer, 18 denotes a microlens, and 19 denotes a waveguide hole, 20 denotes a pixel portion, 21 denotes a unit pixel, 53 denotes a waveguide material film, 200 denotes an image pickup device, 201 denotes an image pickup unit, 202 denotes a light condensing optical unit, 203 denotes a signal processing unit, and 210(1) denotes a solid state Image pickup device. ...

[0245] Example structure of image pickup device

[0246] Next, we will refer to Figure 29 An example structure of an image pickup apparatus according to a third embodiment of the present invention is described. This image pickup device uses a solid-state image pickup device according to an embodiment of the present invention.

[0247] refer to Figure 29 , Image Pickup Device The image pickup device 200 includes an image pickup unit and a solid-state image pickup device 210 . A light condensing optical unit 202 for forming an image is provided on the light condensing side of the image pickup unit 201 . The image pickup unit 201 is connected to a signal processing unit 203 . The signal processing unit 203 includes a signal processing circuit that drives the drive circuit of the image pickup unit 201 to process a signal that is photoelectrically converted into an image by the solid-state image pickup device 210 . The image signal processed by the signal processing unit 203...

[0251] Example structure of solid-state image pickup device

[0252] Figure 30 to Figure 32 Each shows a solid-state image pickup device according to a fourth embodiment of the present invention. The solid-state image pickup device of the present embodiment is a four-pixel sharing type MOS solid-state image pickup device, and the four pixels share one floating diffusion region, one amplification transistor, and one selection transistor. Figure 30 is a plan view showing a pixel portion in which a plurality of four-pixel sharing type unit pixel groups are two-dimensionally arranged. Figure 31A with 31B is a view showing a unit pixel group at the center of an image angle of a pixel portion and a unit pixel group at an edge of an image angle. Figure 32 is along Figure 31A Cross-sectional view taken at XXXII-XXXII in .

[0253] Hereinafter, reference numeral 40 denotes a pixel portion, 38 denotes a solid-state image pickup device, 42 denotes a unit pixel group, PD (PD1 to...