Three-dimensional carbon-based pressure sensor making method

[0027] The schematic flow chart of the present invention is as follows figure 1 As shown, the specific steps of the preparation method of the three-dimensional carbon-based pressure sensor include:

[0028] Step 1, placing the nickel foam in a chemical vapor deposition furnace, feeding methane and hydrogen to react, and preparing graphene;

[0029] Step 2, soak the metallic nickel foam prepared with graphene obtained in step 1 in the mixed aqueous solution of ferric nitrate and hydrochloric acid, remove the metallic nickel foam, and obtain foamed graphene;

[0030] Step 3, washing the graphene foam with water, then drying;

[0031] Step 4. Place carbon-based fibers on the top and bottom of the foamed graphene as a flexible electrode material;

[0032] Step 5: Pouring polydimethylsiloxane on the foamed graphene and the carbon-based fiber flexible electrode to solidify into a pressure sensor device.

[0033] The prepared pressure sensor was subjected to extrusion-recovery aging

[0038] Implementation Case 1: Testing of Physiological Signals

[0039] Attach the prepared pressure sensor to the wrist pulse, connect the source meter,

[0040] (i) Monitor the pulse beat when awake and the pulse beat when sleeping.

[0041] (ii) Fit the pressure sensor near the throat, read it from 1 to 10, and the digital source meter records the curve of the current flowing through the device as a function of time, such as figure 2 shown. Pick out three numbers 1, 3, and 5, read each number three times, compare the original curve from 1 to 10, and find that their current waveforms are consistent. This shows that our pressure sensor is very sensitive to detect the weak vibration pressure generated when speaking.

[0042] Implementation case two

[0043] Put the pressure sensor on the iPhone 6 and turn the iPhone 6 into vibration mode. When dialing the mobile phone, the pressure sensor detects the vibration waveform of the mobile phone in different vibration modes, and obtains stable current-time diagrams of different waveforms, such as image 3 shown.

[0044]The preparation method of the invention is simple and feasible, the raw materials are cheap, and the preparation process is simple. First, the pressure sensor is prepared by preparing a novel carbon-based material foamed graphene, and the material preparation method is mature, cheap and easy to operate. After that, the prepared foamed graphene is combined with the flexible carbon fiber electrode, and then the polydimethylsiloxane PDMS is poured, and the pressure sensing device is prepared by curing.

[0045] It can be seen from the above-mentioned specific embodiment that the present invention is sensitive to low pressure:

[0046]