Preparation method of platinum sheet target material

A platinum sheet and target technology, which is applied in the field of platinum sheet target preparation, can solve the problems of high cracking rate, platinum sheet cannot form platinum sheet, and platinum sheet uniformity is poor, and achieves low cracking rate, small thickness, and yield. high effect

Active Publication Date: 2021-08-10
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented process allows for better control over the properties of thin films made from metals such as Platinum (Pt). By controlling these characteristics during manufacturing processes, researchers can improve their performance or reduce costs associated with producing them.

Problems solved by technology

This patented technical problem addressed in this patents relates to producing thin metallic films with good quality at reasonable costs through conventional processes such as casting or electroforming techniques that involve expensive equipment like metal plating tools used for making electronic devices.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A method for preparing a platinum sheet target according to an embodiment of the present invention, the method comprising the steps of:

[0025] (1) After the platinum ingot was held at 1100 ° C for 1 hour, the first rolling was carried out to obtain a thickness of 3 mm platinum sheet; the first rolling included several recycled rolling A, the rolling path of the circulation rolling A was 10 The quarter; each of the rolled rolling A is 2.5 mm; each of the completion of a circulating rolling A is completed to 1100 ° C;

[0026] (2) The platinum sheet processed after step (1) is annealing, and the annealing treatment is to sinter the platinum sheet after the step (1) by the natural gas spray gun into a red cooling;

[0027] (3) The platinum sheet after treatment with step (2) is a platinum sheet having a thickness of 0.08 mm; the amount of rolling amount of each of the second rolled rolled is 0.20 mm;

[0028] The rolling direction of the plurality of circulation rolling A is th

Embodiment 2

[0030] A method for preparing a platinum sheet target according to an embodiment of the present invention, the method comprising the steps of:

[0031] (1) After holding the platinum ingot at 1050 ° C for 1.5 hours, the first rolling was carried out to obtain a thickness of 2 mm platinum sheet; the first rolling includes several recycled rolling A, the rolling path of the circulation rolling A is 8 The quarter; the amount of rolling amount of each of the circulating rolling A is 2.0 mm; each of the completion of a circulating rolling A is completed to 1050 ° C;

[0032] (2) The platinum sheet processed after (1) is annealing, and the annealing treatment is to sinter the platinum sheet after the step (1) by the methane spray gun into a red cooling;

[0033] (3) The platinum sheet after treatment after step (2) is carried out to obtain a platinum sheet having a thickness of 0.07 mm; each of the second rolled rolling is 0.10 mm;

[0034] The rolling direction of the plurality of circula

Embodiment 3

[0036] A method for preparing a platinum sheet target according to an embodiment of the present invention, the method comprising the steps of:

[0037] (1) After the platinum ingot was held at 1150 ° C for 0.8 hours, the first rolling was carried out to obtain a thickness of 2 mm platinum sheet; the first rolling included several recycled rolling A, the rolling path of the circulation rolling A was 12 The quarter; the amount of rolling amount of each of the cyclic rolling A is 2.2 mm; each of the completion of a circulating rolling A is completed to 1150 ° C;

[0038] (2) The platinum sheet processed after step (1) is annealed, and the annealing treatment is to sinter the platinum sheet after the step (1) by the hydroxide air fountain, and then cooled after redness;

[0039] (3) The platinum sheet after the step (2) was processed by a platinum sheet having a thickness of 0.10 mm; each of the second rolled rolled was 0.30 mm;

[0040] The rolling direction of the plurality of circulat

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Abstract

The invention provides a preparation method of a platinum sheet target material. The preparation method comprises the following steps: (1) carrying out heat preservation on a platinum ingot at 1050-1150 DEG C for 0.8-1.5 hours, and then carrying out first rolling to obtain a platinum sheet with the thickness of 2-3 mm, specifically, the first rolling comprises multiple circulating rolling A, the number of rolling passes of the circulating rolling A is 8-12, the rolling amount of each pass of the circular rolling A is 2.0 to 3.0 mm, and heat preservation is conducted at the temperature of 1050-1150 DEG C after each circular rolling A is completed; (2) carrying out annealing treatment on the platinum sheet treated in step (1), specifically, the annealing treatment mode is that the platinum sheet treated in step (1) is sintered to be red through open fire and then cooled; and (3) carrying out second rolling on the platinum sheet treated in step (2) to obtain a platinum sheet with the thickness of 0.07-0.10 mm, specifically, the rolling amount of each pass of the second rolling is 0.10 to 0.30 mm. The thickness of the platinum sheet target material prepared by the preparation method of the platinum sheet target material is smaller and more uniform, the cracking rate is lower, and the rate of finished products is high.

Description

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Claims

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Application Information

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Owner XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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