Method for mfg. single sheet pneumatic gel mini valve

[0029] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0030] A. Rapid preparation of micro-replication template: adopt SU-850 negative photoresist (USA Micro Chem Company), spin the glue condition at 500rpm for 1 minute, obtain a photoresist with a thickness of 1000μm, and pre-bake at 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 600 seconds, medium baking condition is 95°C for 30 minutes, development time is 15 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0031] B. Replication of the template pattern: Mix Dow Corning's sylgard184A

[0049] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0050] A. Rapid preparation of micro-replication template: adopt SU-850 negative photoresist (Micro Chem Company, USA), the condition of spinning the glue is 2000rpm for 1 minute, and obtain a photoresist with a thickness of 200μm, and the pre-baking condition is 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 100 seconds, medium baking condition is 95°C for 30 minutes, development time is 5 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0051] B. Replication of the template pattern:

[0069] (1) The micro-replication template was obtained by rapid prototyping technology, and the silicone rubber substrate containing the pump cavity structure and microchannels was obtained by casting the silicone rubber material, as follows:

[0070] A. Rapid preparation of micro-replication template: use SU-850 negative photoresist (Micro Chem, USA), spin the glue at 1000rpm for 1 minute, obtain a photoresist with a thickness of 800μm, and pre-bake at 85°C for 30 Minutes, 95°C for 30 minutes, exposure using MA6 lithography machine from German Karl Suss company, exposure time is 300 seconds, medium baking condition is 95°C for 30 minutes, development time is 5 minutes, and then a layer of metal with a thickness of 0.1 microns is sputtered Nickel, to obtain the required photoresist mold, the structure of which is the pump cavity structure and the convex pattern of the microchannel.

[0071] B. Replication of the template pattern: Mix Dow Corning's sylgard184A solution and sylgard