Silver nanowire conductive film and method of fabricating the same

a technology of silver nanoparticles and conductive films, which is applied in the direction of instruments, conductive layers on insulating supports, transportation and packaging, etc., can solve the problems of silver nanoparticle conductivity decreasing, and not being well oxidized

Active Publication Date: 2014-01-23
RES & BUSINESS FOUND SUNGKYUNKWAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The technical effect of this invention relates to an improved method for protecting against corrosion caused by oxygen ingress during manufacturing processes used with electronic devices such as semiconductor chips. By adding specific layers on top of these materials, it can help prevent damage from atmospheric gases that could attack them over time without affect their performance negatively impacted.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the durability and stability of thin metal coatings made from silicon nitride (SiN) layers during electronic devices manufacturing processes while also ensuring good electrical properties with low contact resistances at room temperature.

Method used

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  • Silver nanowire conductive film and method of fabricating the same
  • Silver nanowire conductive film and method of fabricating the same
  • Silver nanowire conductive film and method of fabricating the same

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example 1

[0064]First, a PET film was prepared, and silver (Ag) nanowires were applied onto the PET film. (thickness of Ag nanowires and method of applying the naowires to the PET film, the specific PET film used, etc. may be described here). Next, a TiO2 oxide was coated on the surface of the silver nanowires using an ALD process.

[0065]TTIP (UP chemical) was used as a material for a TiO2 oxidation protection layer, and the ALD process was performed using ALD system (ForALL) equipment at a pressure of 1×10−3 torr and a temperature of 120° C. A desired number of 250-cycle (10 nm) and 500-cycle (20 nm) processes were performed according to the thickness of the TiO2 oxidation protection layer.

[0066]In order to compare a transparent conductive film not coated with an oxidation protection layer with a transparent conductive film coated with an oxidation protection layer, XPS was used to check oxidation of the transparent conductive film over time. In order to analyze the form of the TiO2 oxygen preve

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Abstract

Provided are a silver nanowire conductive film coated with an oxidation protection layer and a method for fabricating the same. A silver nanowire conductive film coated with an oxidation protection layer includes: a substrate; silver nanowires disposed on the substrate; and an oxidation protection layer coated on the silver nanowires, wherein the oxidation protection layer comprises an oxide.

Description

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Claims

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Application Information

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Owner RES & BUSINESS FOUND SUNGKYUNKWAN UNIV
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