High-sensitivity micro-accelerometer based on singular point and use method of high-sensitivity micro-accelerometer

[0051] For details, see figure 2 , the head and tail ends of the first resonator A are connected to the coupling beam 201 fixed to the anchor region electrode 202 through short beams;

[0052] The first driving electrode A2 is placed on the left side of the first resonator A, and is used for connecting AC voltage and DC voltage;

[0053] The first detection electrode A1 is placed between the first resonator A and the first driving electrode A2, and is used for connecting a DC voltage to detect the motion signal of the first resonator A.

[0054] The head and tail ends of the second resonator B are connected to the coupling beam 201 fixed to the anchor region electrode 202 through short beams;

[0055] The second driving electrode B2 is placed on the right side of the second resonator B for connecting the AC voltage and the DC voltage;

[0056] The second detection electrode B1 is placed between the second driving electrode B2 and the second resonator B, and is used for connect

[0067] Damping coefficient c of first resonator A and second resonator B 1 ≠c 2 , the singular point still exists in the resonator system at this time:

[0068]

[0069] The same conclusion can be drawn.

[0070] The working principle of the micro-accelerometer is:

[0071] The mass of the first resonator A is known to be m 1 , the stiffness is k 1 , the mass of the second resonator B is m 2 , the stiffness is k 2 , and satisfy m 1 =m 2 =m,k 1 =k 2 =k.

[0072] The damping adjustment circuit is adjusted to adjust the damping coefficients of the first resonator A and the second resonator B to satisfy the condition of the singular point, and the resonant system vibrates at a resonant frequency at this time.

[0073] The resonant system is placed in the acceleration environment to be measured, and the acceleration to be measured will disturb the stiffness of the second resonator B by Δk, so that the resonant system is far away from the singular point, and the resonant