Preparation process before silicon wafer cutting

A technology of wafers and silicon wafers, which is applied in the field of preparation process before cutting silicon wafers, can solve the problems of increasing production costs of enterprises, achieve the effects of reducing the incidence of waste products, reducing production costs, and ensuring the accuracy of cutting

Inactive Publication Date: 2020-04-28
江阴苏阳电子股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technology allows for sapphire wafers with specific dimensions before they can be used effectively by manufacturors without having any issues or concerns about their quality. It also helps prevent wasted material from being produced while ensuring accurate dicing.

Problems solved by technology

The present problem addressed in this patents relates to prevention from damage caused during dicer processing when cutting thin films made up mostly of crystalline materials such as monocrystal Si (Si) used in electronics devices like computers. This can cause defects called chipping due to stress concentration between different layers within the material being processed. Previous methods have been developed but they were either expensive or did little more than help reduce these issues.

Method used

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Embodiment Construction

[0015] The present invention mainly aims at the chip loading process in the chip packaging process, and provides a preparation process before cutting silicon wafers. The specific steps are as follows:

[0016] Step 1. Confirm the model of the scribing knife according to the product name and the size of the scribing groove;

[0017] Step 2. The operator should check the stage before cutting. If there are impurities on the stage, the operator should blow them away with an air gun;

[0018] Step 3. Click "Blade Status Information" to read the exposure of the blade. When the exposure of the blade is less than the minimum exposure of the blade, the scribing knife needs to be replaced. The minimum exposure of the blade = the thickness of the wafer + the amount of cut film + 50um. The scribing knife needs to be replaced when the exposure of the knife does not reach the specified lower limit of use but the knife mark does not meet the specification;

[0019] Step 4. Pure water detection

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PUM

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Abstract

The invention relates to a preparation process before silicon wafer cutting. The preparation process comprises the following steps that S1, the type of a scribing blade is determined according to thename of a product and the size of a scribe lane; S2, an operator is required to inspect an objective table before cutting, and if impurities exist on the objective table, the operator is required to blow off the impurities by using an air gun; S3, the interface of 'blade condition data' is clicked so as to read the exposure amount of a cutting edge; and S4, pure water detection is carried out, wherein the detection content comprises 1, the resistance value of pure water, and 2, the pH value of the pure water, and as for the frequency, the detection is carried out once every shift and carried out at work during the morning shift and evening shift. According to the preparation process before silicon wafer cutting, related equipment and wafers are detected in all directions before wafer cutting is carried out, so that the safety during cutting and the cutting accuracy are ensured, the waste occurrence rate is reduced, and the production cost of enterprises is reduced.

Description

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Claims

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Application Information

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Owner 江阴苏阳电子股份有限公司
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