The present invention provides a
chip-level ultra-miniature refrigerator for an uncooled
infrared detector. The
chip-level ultra-miniature refrigerator comprises an outer-layer
package layer structureand an inner-layer refrigerator structure; the outer-layer
package layer structure comprises a vacuum
package housing, an anti-
radiation layer and a
radiation layer, and the top portion of the vacuumpackage housing is provided with an
infrared sensitive window; the inner-layer refrigerator structure comprises an upper-layer structure, a middle-layer structure and a lower-layer structure. The
chip-level ultra-miniature refrigerator performs heating and cooling of a nano-film thermoelectric layer to maintain a constant temperature so as to effectively block the heat exchange between a supportstructure and an external environment through a substrate, and a heat
insulation layer is laid at the bottom portion of the substrate to further inhibit the heat conduction of the external environment. An annular
cantilever beam and the support structure further avoid heat conduction, the heat
insulation layer is arranged to further inhibit the internal heat conduction and exchange so as to achieve heat insulation between the
infrared detector and the external environment. The anti-
radiation layer is deposited and grown to inhibit heat radiation, and a vacuum package method is employed to avoid heat
convection and exchange of the internal portion and the external portion.