The invention discloses an efficient
silicon heterojunction solar cell and a preparation method thereof, and belongs to the technical field of solar cells. A thin SiO2 layer, a hydrogenated
amorphous silicon oxycarbide thin film layer, a C-doped SiO2 layer, an
amorphous silicon doped N-type layer, a TCO conductive layer and an
electrode are sequentially arranged on the front surface of an N-type
crystal silicon wafer of the battery; a thin SiO2 layer, a hydrogenated
amorphous silicon oxycarbide thin film layer, a C-doped SiO2 layer, an amorphous
silicon doped P-type layer, a TCO conductive layer and an
electrode are sequentially arranged on the back surface of the substrate; and the amorphous silicon doped P-type layer comprises a light B-doped amorphous silicon layer and a heavy B-doped amorphous silicon layer. According to the
heterojunction solar cell with the hydrogenated
amorphous carbon silicon oxide thin film as the intrinsic
passivation layer, the excellent
passivation effect on the
crystalline silicon surface is achieved, and interface carrier recombination is reduced; and meanwhile, an improved double-
diffusion B process is adopted, so that reduction of forbidden bandwidth and unnecessary passive film
doping caused by
diffusion of B atoms to the intrinsic amorphous silicon layer during B2H6
doping are prevented, and the conversion efficiency of the
silicon heterojunction battery is improved.